Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

2008 ◽  
Vol 103 (11) ◽  
pp. 113509 ◽  
Author(s):  
Sung-Soo Yim ◽  
Do-Joong Lee ◽  
Ki-Su Kim ◽  
Soo-Hyun Kim ◽  
Tae-Sik Yoon ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Nucleation Kinetics ◽  
Layer Deposition ◽  
Kinetics Of

Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride

RSC Advances ◽  
2016 ◽  
Vol 6 (72) ◽  
pp. 68515-68524 ◽  
Author(s):  
Luchana L. Yusup ◽  
Jae-Min Park ◽  
Yong-Ho Noh ◽  
Sun-Jae Kim ◽  
Won-Jun Lee ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Surface Sites ◽  
Thermodynamics And Kinetics ◽  
Layer Deposition ◽  
Kinetics Of

The reactivity of surface sites plays a very important role to determine the thermodynamics and kinetics of ALD processes.

Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride

2014 ◽  
Vol 6 (13) ◽  
pp. 10534-10541 ◽  
Author(s):  
Ciaran A. Murray ◽  
Simon D. Elliott ◽  
Dennis Hausmann ◽  
Jon Henri ◽  
Adrien LaVoie
Keyword(s):  
Reaction Mechanism ◽  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Exposure Time ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Selective atomic layer deposition of MoSix on Si (0 0 1) in preference to silicon nitride and silicon oxide

2018 ◽  
Vol 462 ◽  
pp. 1008-1016 ◽  
Author(s):  
Jong Youn Choi ◽  
Christopher F. Ahles ◽  
Raymond Hung ◽  
Namsung Kim ◽  
Andrew C. Kummel
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of carbon doped silicon oxide by precursor design and process tuning

2018 ◽  
Vol 36 (2) ◽  
pp. 021509 ◽  
Author(s):  
Meiliang Wang ◽  
Haripin Chandra ◽  
Xinjian Lei ◽  
Anupama Mallikarjunan ◽  
Kirk Cuthill ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Oxide ◽  
Atomic Layer ◽  
Carbon Doped ◽  
Layer Deposition ◽  
Doped Silicon
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