Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition

2016 ◽  
Author(s):  
Golnaz Karbasian ◽  
Alexei O. Orlov ◽  
Alexander S. Mukasyan ◽  
Gregory L. Snider
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Layer Deposition ◽  
Tunnel Barriers ◽  
Electron Transistors

scholarly journals Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition

2017 ◽  
Vol 7 (3) ◽  
pp. 246 ◽  
Author(s):  
Golnaz Karbasian ◽  
Michael McConnell ◽  
Hubert George ◽  
Louisa Schneider ◽  
Matthew Filmer ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Metal Insulator ◽  
Layer Deposition ◽  
Metal Insulator Metal ◽  
Tunnel Barriers ◽  
Electron Transistors

Atomic layer deposition of Al2O3 for single electron transistors utilizing Pt oxidation and reduction

2016 ◽  
Vol 34 (1) ◽  
pp. 01A139 ◽  
Author(s):  
Michael S. McConnell ◽  
Louisa C. Schneider ◽  
Golnaz Karbasian ◽  
Sergei Rouvimov ◽  
Alexei O. Orlov ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Layer Deposition ◽  
Electron Transistors
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