Mechanical characterization of thin TiO2 films by means of microelectromechanical systems-based cantilevers

2010 ◽  
Vol 81 (1) ◽  
pp. 015109 ◽  
Author(s):  
A. Adami ◽  
M. Decarli ◽  
R. Bartali ◽  
V. Micheli ◽  
N. Laidani ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Mechanical Characterization ◽  
Tio2 Films

A Nanoindentation-Based Microbridge Testing Method for Mechanical Characterization of Thin Films for MEMS Applications

2005 ◽  
Author(s):  
Zhiqiang Cao ◽  
Tong-Yi Zhang ◽  
Xin Zhang
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Young’S Modulus ◽  
Microelectromechanical Systems ◽  
Mechanical Characterization ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
Testing Method ◽  
Chemical Vapor Deposited

Plasma-enhanced chemical vapor deposited (PECVD) silane-based oxides (SiOx) have been widely used in both microelectronics and MEMS (MicroElectroMechanical Systems) to form electrical and/or mechanical components. In this paper, a novel nanoindentation-based microbridge testing method is developed to measure both the residual stresses and Young’s modulus of PECVD SiOx films on silicon wafers. Theoretically, we considered both the substrate deformation and residual stress in the thin film and derived a closed formula of deflection versus load. The formula fitted the experimental curves almost perfectly, from which the residual stresses and Young’s modulus of the film were determined. Experimentally, freestanding microbridges made of PECVD SiOx films were fabricated using the silicon undercut bulk micromachining technique. The results showed that the as-deposited PECVD SiOx films had a residual stress of −155±17 MPa and a Young’s modulus of 74.8±3.3 GPa.

Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application

2012 ◽  
Vol 11 (2) ◽  
pp. 023006-1 ◽  
Author(s):  
Jinkui Chu ◽  
Jiali Gao ◽  
Le Guan ◽  
Guoqing Zhang ◽  
Ze Liu
Keyword(s):  
Thin Films ◽  
Microelectromechanical Systems ◽  
Mechanical Characterization ◽  
Aspect Ratios

Mechanical characterization of Trebisacce stone: preliminary results

2016 ◽  
Vol 38 ◽  
pp. 47-50
Author(s):  
Giulia Forestieri ◽  
Maurizio Ponte
Keyword(s):  
Mechanical Characterization ◽  
Preliminary Results

Spectro-mechanical Characterization of Aromaticity and Maturity of Kerogens in Oil Shale at 6 nm Spatial Resolution

2018 ◽  
Author(s):  
Devon Jakob ◽  
Le Wang ◽  
Haomin Wang ◽  
Xiaoji Xu
Keyword(s):  
Spatial Resolution ◽  
Oil Shale ◽  
Infrared Imaging ◽  
Mechanical Characterization ◽  
Optical Diffraction ◽  
Chemical Compositions ◽  
Valuable Insight ◽  
Eagle Ford Shale

<p>In situ measurements of the chemical compositions and mechanical properties of kerogen help understand the formation, transformation, and utilization of organic matter in the oil shale at the nanoscale. However, the optical diffraction limit prevents attainment of nanoscale resolution using conventional spectroscopy and microscopy. Here, we utilize peak force infrared (PFIR) microscopy for multimodal characterization of kerogen in oil shale. The PFIR provides correlative infrared imaging, mechanical mapping, and broadband infrared spectroscopy capability with 6 nm spatial resolution. We observed nanoscale heterogeneity in the chemical composition, aromaticity, and maturity of the kerogens from oil shales from Eagle Ford shale play in Texas. The kerogen aromaticity positively correlates with the local mechanical moduli of the surrounding inorganic matrix, manifesting the Le Chatelier’s principle. In situ spectro-mechanical characterization of oil shale will yield valuable insight for geochemical and geomechanical modeling on the origin and transformation of kerogen in the oil shale.</p>

MECHANICAL CHARACTERIZATION OF POLYMER MATERIALS UNDER LOW STRAIN RATE LOADING

2017 ◽  
Vol 5 (3) ◽  
pp. 8
Author(s):  
KUMAR DINESH ◽  
KAUR ARSHDEEP ◽  
AGGARWAL YUGAM KUMAR ◽  
UNIYAL PIYUSH ◽  
KUMAR NAVIN ◽  
...  
Keyword(s):  
Strain Rate ◽  
Mechanical Characterization ◽  
Polymer Materials ◽  
Strain Rate Loading ◽  
Low Strain Rate

MECHANICAL CHARACTERIZATION OF VEGETAL COMPOSITES USING DIC

2019 ◽  
Author(s):  
Alexandre Luiz Pereira ◽  
Rafael Oliveira Santos ◽  
DOINA BANEA ◽  
Álisson Lemos
Keyword(s):  
Mechanical Characterization
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