scholarly journals Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

2010 ◽  
Vol 107 (11) ◽  
pp. 116102 ◽  
Author(s):  
A. J. M. Mackus ◽  
J. J. L. Mulders ◽  
M. C. M. van de Sanden ◽  
W. M. M. Kessels
Keyword(s):  
Electron Beam ◽  
Atomic Layer Deposition ◽  
High Purity ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Electron Beam Induced Deposition ◽  
Local Deposition

scholarly journals Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition

2019 ◽  
Vol 31 (4) ◽  
pp. 1250-1257 ◽  
Author(s):  
Alfredo Mameli ◽  
Bora Karasulu ◽  
Marcel A. Verheijen ◽  
Beatriz Barcones ◽  
Bart Macco ◽  
...  
Keyword(s):  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Electron Beam Induced Deposition

Facile rearrangement of molecular layer deposited metalcone thin films by electron beam irradiation for area selective atomic layer deposition

2021 ◽  
Author(s):  
Seunghwan Lee ◽  
GeonHo Baek ◽  
Hye-mi Kim ◽  
Yong-Hwan Kim ◽  
Jin-Seong Park
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Electron Beam Irradiation ◽  
Molecular Layer ◽  
Atomic Layer ◽  
Beam Irradiation ◽  
Selective Deposition ◽  
Layer Deposition ◽  
Amorphous Structures

Metalcone films can be rearranged from amorphous structures to 2D-like carbon by electron beam irradiation. The irradiated indicone (HQ) film can be used as an inhibitor for selective deposition delaying 20 cycles of ALD of ZnO.

Polycrystalline and high purity SnO2 films by plasma-enhanced atomic layer deposition using H2O plasma at very low temperatures of 60–90 °C

Vacuum ◽  
2021 ◽  
pp. 110739
Author(s):  
Jong Hyeon Won ◽  
Heenang Choi ◽  
Seong Ho Han ◽  
Bo Keun Park ◽  
Taek-Mo Chung ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Purity ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of an Al2O3dielectric on ultrathin graphite by using electron beam irradiation

2012 ◽  
Vol 33 (9) ◽  
pp. 093004 ◽  
Author(s):  
Ran Jiang ◽  
Lingguo Meng ◽  
Xijian Zhang ◽  
Hyung-Suk Jung ◽  
Cheol Seong Hwang
Keyword(s):  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Electron Beam Irradiation ◽  
Atomic Layer ◽  
Beam Irradiation ◽  
Layer Deposition

Atomic layer deposition of lanthana thin films using high-purity lanthanum amino precursors

2007 ◽  
Vol 104 (2-3) ◽  
pp. 220-224 ◽  
Author(s):  
Ronald Inman ◽  
Steven A. Schuetz ◽  
Carter M. Silvernail ◽  
Snjezana Balaz ◽  
Peter A. Dowben ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
High Purity ◽  
Atomic Layer ◽  
Layer Deposition
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