Novel method for fabrication of nanoscale single-electron transistors: Electron beam induced deposition of Pt and atomic layer deposition of tunnel barriers

2011 ◽  
Vol 29 (6) ◽  
pp. 06FB01 ◽  
Author(s):  
Hubert C. George ◽  
Tatyana A. Orlova ◽  
Alexei O. Orlov ◽  
Gregory L. Snider
Keyword(s):  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Layer Deposition ◽  
Tunnel Barriers ◽  
Novel Method ◽  
Electron Beam Induced Deposition ◽  
Electron Transistors

scholarly journals Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition

2017 ◽  
Vol 7 (3) ◽  
pp. 246 ◽  
Author(s):  
Golnaz Karbasian ◽  
Michael McConnell ◽  
Hubert George ◽  
Louisa Schneider ◽  
Matthew Filmer ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Metal Insulator ◽  
Layer Deposition ◽  
Metal Insulator Metal ◽  
Tunnel Barriers ◽  
Electron Transistors

Atomic layer deposition of Al2O3 for single electron transistors utilizing Pt oxidation and reduction

2016 ◽  
Vol 34 (1) ◽  
pp. 01A139 ◽  
Author(s):  
Michael S. McConnell ◽  
Louisa C. Schneider ◽  
Golnaz Karbasian ◽  
Sergei Rouvimov ◽  
Alexei O. Orlov ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Layer Deposition ◽  
Electron Transistors

scholarly journals Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition

2019 ◽  
Vol 31 (4) ◽  
pp. 1250-1257 ◽  
Author(s):  
Alfredo Mameli ◽  
Bora Karasulu ◽  
Marcel A. Verheijen ◽  
Beatriz Barcones ◽  
Bart Macco ◽  
...  
Keyword(s):  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Electron Beam Induced Deposition
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