Determination of the fluorine content ina‐Si:H:F by infrared spectroscopy, electron probe microanalysis, x‐ray photoelectron spectroscopy, and secondary ion mass spectrometry
1996 ◽
Vol 11
(1)
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pp. 229-235
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2013 ◽
Vol 56
(9)
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pp. 348-354
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2011 ◽
Vol 29
(4)
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pp. 04D113
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1994 ◽
Vol 12
(3)
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pp. 671-676
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