Influence of dc bias voltage on the refractive index and stress of carbon‐diamond films deposited from a CH4/Ar rf plasma
1997 ◽
Vol 48
(3)
◽
pp. 317-323
Keyword(s):
2000 ◽
Vol 9
(9-10)
◽
pp. 1636-1639
◽
2004 ◽
Vol 227
(1-4)
◽
pp. 364-372
◽
2017 ◽
Vol 13
(2)
◽
pp. 166-172
1991 ◽
Vol 49
◽
pp. 880-881
Keyword(s):
2018 ◽
Vol 83
◽
pp. 115-118
◽
2019 ◽
Vol 45
(9)
◽
pp. 11989-12000
◽
Keyword(s):