Electron cyclotron resonance plasma production by using pulse mode microwaves and dependences of ion beam current and plasma parameters on the pulse condition

2012 ◽  
Vol 83 (2) ◽  
pp. 02A324 ◽  
Author(s):  
Ryutaro Kiriyama ◽  
Tomoya Takenaka ◽  
Yousuke Kurisu ◽  
Dai Nozaki ◽  
Fuminobu Sato ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Beam Current ◽  
Pulse Mode ◽  
Electron Cyclotron ◽  
Plasma Parameters ◽  
Plasma Production ◽  
Pulse Condition ◽  
Resonance Plasma

Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4769-4772 ◽  
Author(s):  
Tamotsu Morimoto ◽  
Yasuyoshi Yasaka ◽  
Masaki Tozawa ◽  
Takashi Akahori ◽  
Hideaki Amano ◽  
...  
Keyword(s):  
Chemical Reaction ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Production ◽  
Oxide Deposition ◽  
Resonance Plasma

Electron cyclotron resonance plasma source by using Ku-band traveling-wave tube amplifier for broad ion-beam processing

2006 ◽  
Vol 77 (3) ◽  
pp. 03C104 ◽  
Author(s):  
Toyohisa Asaji ◽  
Hiroshi Sasaki ◽  
Yushi Kato ◽  
Fuminobu Sato ◽  
Toshiyuki Iida ◽  
...  
Keyword(s):  
Traveling Wave ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Traveling Wave Tube ◽  
Wave Tube ◽  
Resonance Plasma ◽  
Ku Band

Compact Electron Cyclotron Resonance Plasma Source Optimization for Ion Beam Applications

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4576-4582 ◽  
Author(s):  
Patrick O'Keeffe ◽  
Kouji Yamakawa ◽  
Harunobu Mutoh ◽  
Shoji Den ◽  
Yuzo Hayashi
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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