Two-dimensional simulation of plasma-based ion implantation

1999 ◽  
Vol 85 (2) ◽  
pp. 761-766 ◽  
Author(s):  
M. Paulus ◽  
L. Stals ◽  
U. Rüde ◽  
B. Rauschenbach
2018 ◽  
Author(s):  
Haibo Li ◽  
Maocheng Tian ◽  
Xiaohang Qu ◽  
Min Wei

AIP Advances ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 055209
Author(s):  
Yong Che ◽  
Qing Zang ◽  
Xiaofeng Han ◽  
Shumei Xiao ◽  
Kai Huang ◽  
...  

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