Low temperature direct bonding mechanisms of tetraethyl orthosilicate based silicon oxide films deposited by plasma enhanced chemical vapor deposition
1997 ◽
Vol 15
(5)
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pp. 1843
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1995 ◽
Vol 24
(10)
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pp. 1507-1510
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1993 ◽
Vol 140
(10)
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pp. 3014-3018
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2003 ◽
Vol 444
(1-2)
◽
pp. 125-131
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Keyword(s):
Keyword(s):
2000 ◽
Vol 39
(Part 1, No. 1)
◽
pp. 330-336
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Keyword(s):
1985 ◽
Vol 132
(2)
◽
pp. 482-488
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Keyword(s):
2006 ◽
Vol 24
(2)
◽
pp. 291-295
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Keyword(s):
1985 ◽
Vol 3
(6)
◽
pp. 1604
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Keyword(s):
Keyword(s):