Non-invasive in situ plasma monitoring of reactive gases using the floating harmonic method for inductively coupled plasma etching application
2013 ◽
Vol 84
(4)
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pp. 043502
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2008 ◽
Vol 112
(46)
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pp. 17760-17763
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1999 ◽
Vol 146
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pp. 296-298
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2012 ◽
Vol 30
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pp. 031301
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2005 ◽
Vol 34
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pp. 740-745
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2015 ◽
Vol 32
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pp. 058102
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