Effect of substrate temperature on structural and electrical properties of liquid-delivery metal organic chemical vapor deposited indium oxide thin films on silicon

2008 ◽  
Vol 26 (3) ◽  
pp. 909 ◽  
Author(s):  
S. Venkat ◽  
N. Pammi ◽  
B. S. Sahu ◽  
Nak-Jin Seong ◽  
Soon-Gil Yoon
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Substrate Temperature ◽  
Indium Oxide ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Oxide Thin Films ◽  
Chemical Vapor Deposited ◽  
Structural And Electrical Properties ◽  
Metal Organic

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Transparent Conducting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Optical, structural, and electrical properties of indium oxide thin films prepared by the sol-gel method

1997 ◽  
Vol 82 (2) ◽  
pp. 865-870 ◽  
Author(s):  
Radhouane Bel Hadj Tahar ◽  
Takayuki Ban ◽  
Yutaka Ohya ◽  
Yasutaka Takahashi
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Indium Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
Structural And Electrical Properties
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