In situ oxidation studies of Cu thin films: Growth kinetics and oxide phase evolution

We present the identification of crystalline phases by in situ X-ray diffraction during growth and monitor the phase evolution during subsequent thermal treatment of CH3NH3PbX3 (X = I, Br, Cl) perovskite thin films.

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In Situ Heteroepitaxial Bi2Sr2CaCu2O8 Thin Films Prepared by Metalorganic Chemical Vapor Deposition

MRS Proceedings ◽

10.1557/proc-335-285 ◽

1993 ◽

Vol 335 ◽

Author(s):

Frank Dimeo ◽

Bruce W. Wessels ◽

Deborah A. Neumayer ◽

Tobin J. Marks ◽

Jon L. Schindler ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Phase ◽

Growth Conditions ◽

X Ray Diffraction ◽

Metalorganic Chemical

AbstractBi2Sr2CaCu2O8 thin films have been prepared in situ by low pressure metalorganic chemical vapor deposition using fluorinated β–diketonate precursors. The influence of the growth conditions on the oxide phase stability and impurity phase formation was examined as well as the superconducting properties of the films. Thin films deposited on LaAIO3 substrates were epitaxial as confirmed by x-ray diffraction measurements, including θ-2θ and φ scans. Four probe resistivity measurements showed the films to be superconducting with a maximum Tc0 of 90 K without post annealing. This Tc0 is among the highest reported for thin films of the BSCCO (2212) phase, and approaches reported bulk values.

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In situ oxidation studies on (001) copper-nickel alloy thin films

Oxidation of Metals ◽

10.1007/bf00608015 ◽

1977 ◽

Vol 11 (6) ◽

pp. 321-334 ◽

Cited By ~ 11

Author(s):

Klaus Heinemann ◽

D. Bhogeswara Rao ◽

D. L. Douglass

Keyword(s):

Thin Films ◽

Nickel Alloy ◽

In Situ Oxidation ◽

Copper Nickel ◽

Copper Nickel Alloy

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Fabrication and characterization of p-type ZnO nano-thin films prepared by in situ oxidation of sputtered Zn3N2

2008 2nd IEEE International Nanoelectronics Conference ◽

10.1109/inec.2008.4585503 ◽

2008 ◽

Author(s):

Shao Le-xi ◽

Zhang Jun

Keyword(s):

Thin Films ◽

In Situ Oxidation ◽

Fabrication And Characterization ◽

P Type

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In situ phase evolution study in magnetron sputtered tantalum thin films

Thin Solid Films ◽

10.1016/s0040-6090(02)00941-0 ◽

2002 ◽

Vol 420-421 ◽

pp. 287-294 ◽

Cited By ~ 15

Author(s):

S.L Lee ◽

D Windover ◽

T.-M Lu ◽

M Audino

Keyword(s):

Thin Films ◽

Phase Evolution ◽

Evolution Study

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Crystallization Kinetics and Texture of Sol-Gel PZT Thin Films

MRS Proceedings ◽

10.1557/proc-541-363 ◽

1998 ◽

Vol 541 ◽

Author(s):

V.Ya. Shur ◽

E.B. Blankova ◽

A.L. Subbotin ◽

E.A. Borisova ◽

D. Bolten ◽

...

Keyword(s):

Thin Films ◽

Perovskite Phase ◽

Scattered Light ◽

Sol Gel ◽

Phase Evolution ◽

Optical Microscope ◽

Mathematical Treatment ◽

Transformation Kinetics ◽

Pzt Thin Films

AbstractThe morphology and phase evolution of sol-gel PZT thin films during rapid thermal annealing are investigated by in situ recording of scattered light intensity measured in reflected mode and momentary patterns visualized by optical microscope. In addition the texture and fractions of growing phases and the angular dependence of the scattered light are studied in partly annealed films. The kinetic parameters characterizing the transition from pyrochlore to perovskite phase are extracted by mathematical treatment of experimental data. It is shown that the film's texture and the transformation kinetics strongly depend on pyrolysis temperature. A mechanism of texture formation is proposed.

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