scholarly journals Solution-processed metal oxide dielectric films: Progress and outlook

APL Materials ◽  
2021 ◽  
Vol 9 (12) ◽  
pp. 120701
Author(s):  
Won-June Lee ◽  
Taehyun Kwak ◽  
Jun-Gyu Choi ◽  
Sungjun Park ◽  
Myung-Han Yoon
Keyword(s):  
Metal Oxide ◽  
Dielectric Films ◽  
Solution Processed

Doped Metal Oxide Nanocrystals for Solution-Processed Hole Extraction Layers in High Efficient Organic Solar Cells

2018 ◽  
Author(s):  
Riva Alkarsifi ◽  
Florent Pourcin ◽  
Pavlo Perkhun ◽  
Mats Fahlman ◽  
Christine Videlot-Ackermann ◽  
...  
Keyword(s):  
Solar Cells ◽  
Metal Oxide ◽  
Organic Solar Cells ◽  
Solution Processed ◽  
High Efficient

Characterization of HfO2/Si Exposed to Water Vapor at Room Temperature

2006 ◽  
Vol 917 ◽  
Author(s):  
Carlos Driemeier ◽  
Elizandra Martinazzi ◽  
Israel J. R. Baumvol ◽  
Evgeni Gusev
Keyword(s):  
Water Vapor ◽  
Metal Oxide ◽  
Room Temperature ◽  
Gate Dielectric ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Dielectric Films ◽  
Nuclear Reaction Analysis ◽  
Environmental Air

AbstractHfO2-based materials are the leading candidates to replace SiO2 as the gate dielectric in Si-based metal-oxide-semiconductor filed-effect transistors. The ubiquitous presence of water vapor in the environments to which the dielectric films are exposed (e.g. in environmental air) leads to questions about how water could affect the properties of the dielectric/Si structures. In order to investigate this topic, HfO2/SiO2/Si(001) thin film structures were exposed at room temperature to water vapor isotopically enriched in 2H and 18O followed by quantification and profiling of these nuclides by nuclear reaction analysis. We showed i) the formation of strongly bonded hydroxyls at the HfO2 surface; ii) room temperature migration of oxygen and water-derived oxygenous species through the HfO2 films, indicating that HfO2 is a weak diffusion barrier for these oxidizing species; iii) hydrogenous, water-derived species attachment to the SiO2 interlayer, resulting in detrimental hydrogenous defects therein. Consequences of these results to HfO2-based metal-oxide-semiconductor devices are discussed.

An Ultra‐Flexible Solution‐Processed Metal‐Oxide/Carbon Nanotube Complementary Circuit Amplifier with Highly Reliable Electrical and Mechanical Stability

2019 ◽  
Vol 6 (1) ◽  
pp. 1900845 ◽  
Author(s):  
Kyung‐Tae Kim ◽  
Seung‐Han Kang ◽  
Jaeyoung Kim ◽  
Jae Sang Heo ◽  
Yong‐Hoon Kim ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Metal Oxide ◽  
Mechanical Stability ◽  
Solution Processed
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