Photocurable Polyimide Gate Insulator for Pentacene Thin-Film Transistor With Excellent Chemical Resistance by Low Temperature Processing

2010 ◽  
Vol 519 (1) ◽  
pp. 192-198 ◽  
Author(s):  
Jin Hee Lee ◽  
Ji Young Kim ◽  
Mi Hye Yi ◽  
Jae Won Ka ◽  
Taek Sung Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Chemical Resistance ◽  
Thin Film Transistor ◽  
Gate Insulator ◽  
Low Temperature Processing ◽  
Excellent Chemical

Stacked gate insulator of photooxide and PECVD film from SiH4 and N2O for low-temperature poly-Si thin-film transistor

2003 ◽  
Vol 86 (11) ◽  
pp. 21-28
Author(s):  
Yukihiko Nakata ◽  
Tetsuya Okamoto ◽  
Takashi Itoga ◽  
Toshimasa Hamada ◽  
Yutaka Ishii
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistor ◽  
Gate Insulator ◽  
Si Thin Film

Ge-Channel Thin-Film Transistor with Schottky Source/Drain Fabricated by Low-Temperature Processing

2007 ◽  
Vol 46 (3B) ◽  
pp. 1250-1253 ◽  
Author(s):  
Taizoh Sadoh ◽  
Hayato Kamizuru ◽  
Atsushi Kenjo ◽  
Masanobu Miyao
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistor ◽  
Low Temperature Processing
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