Time-Resolved Measurement of Charging on Hole Bottoms of SiO2Wafer Exposed to Plasma Etching in a Pulsed Two-Frequency Capacitively Coupled Plasma
2005 ◽
Vol 44
(No. 35)
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pp. L1105-L1108
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1997 ◽
Vol 30
(12)
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pp. 1783-1789
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2021 ◽
Vol 39
(6)
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pp. 063002
2010 ◽
Vol 28
(4)
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pp. 755-760
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2019 ◽
Vol 8
(4)
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pp. Q76-Q79
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2011 ◽
Vol 39
(11)
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pp. 2542-2543
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Keyword(s):