Grain boundary scattering for temperature coefficient of resistance (TCR) behaviour of Ta–Si–N thin films

2008 ◽  
Vol 41 (18) ◽  
pp. 185404 ◽  
Author(s):  
C K Chung ◽  
A Nautiyal ◽  
T S Chen ◽  
Y L Chang
2014 ◽  
Vol 32 (6) ◽  
pp. 061503 ◽  
Author(s):  
Katayun Barmak ◽  
Amith Darbal ◽  
Kameswaran J. Ganesh ◽  
Paulo J. Ferreira ◽  
Jeffrey M. Rickman ◽  
...  

1981 ◽  
Vol 10 ◽  
Author(s):  
D. R. Campbell ◽  
S. Mader ◽  
W. K. Chu

ABSTRACTResistivity and grain size measurements on thin films of co-sputtered WSi2 show that the resistivity in this material is dominated by grain boundary scattering. The reflection coefficient for the transport of charge carriers through the grain boundaries was determined to be approximately 0.9.


2015 ◽  
Vol 107 (19) ◽  
pp. 192102 ◽  
Author(s):  
Janne-Petteri Niemelä ◽  
Yasushi Hirose ◽  
Kei Shigematsu ◽  
Masahito Sano ◽  
Tetsuya Hasegawa ◽  
...  

2018 ◽  
Vol 5 (6) ◽  
pp. 1701411 ◽  
Author(s):  
Max Kneiß ◽  
Chang Yang ◽  
José Barzola-Quiquia ◽  
Gabriele Benndorf ◽  
Holger von Wenckstern ◽  
...  

1994 ◽  
Vol 238 (1) ◽  
pp. 158-162 ◽  
Author(s):  
S.Y. Mar ◽  
J.S. Liang ◽  
C.Y. Sun ◽  
Y.S. Huang

Author(s):  
Anh Thanh Tuan Pham ◽  
Dung Van Hoang ◽  
Truong Huu Nguyen ◽  
Thang Bach Phan ◽  
Vinh Cao Tran

this work, impacts of the thickness on electron mobility of Ga and H2 co-doped ZnO (HGZO) thin films were investigated. The HGZO films were prepared on glass substrate by using magnetron sputtering from ceramic Ga-doped ZnO (GZO) target in the gas mixture of argon and hydrogen. Based on the Hall measurement, the mobility enhanced fastly from 44.6 to 53.4cm2/Vs with the increasing thickness from 350 to 900 nm, then tends to be saturated at ~55cm2/Vs with further thickness. Most of the films achieve the mobility of >50cm2/Vs, which is very high value for sputtered TCOs thin films. The thicknessdependent mobility is explained in term of grain boundary scattering. The improvement of crystalline quality reduced grain boundary scattering, which lead to the fast increase in mobility of the films with 350–900nm in thickness. When the thickness increased more than 900nm, however, the appearance of many defects increased scattering centers and saturates the mobility. Furthermore, the results showed the HGZO films with optimum thickness of 800nm obtained low resistivity (5.3 10-4􀁛cm), high average transmittance (83.3%) in the wide wavelength range of 400–1100nm, and the highest figure of merit (10.3 103􀁛-1cm-1) corresponding to high mobility (51.1cm2/Vs).


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