Diagnostics of N2–Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface

2008 ◽  
Vol 41 (4) ◽  
pp. 045205 ◽  
Author(s):  
S Saloum ◽  
M Naddaf ◽  
B Alkhaled
Keyword(s):  
Plasma Treatment ◽  
Hollow Cathode ◽  
System Application ◽  
Hollow Cathode Discharge ◽  
Remote Plasma ◽  
Discharge System ◽  
Ar Plasma

Characterization of the Remote Plasma Generated in a Pulsed-DC Gas-Flow Hollow-Cathode Discharge

2007 ◽  
Vol 35 (3) ◽  
pp. 527-533 ◽  
Author(s):  
Cristian Paduraru ◽  
Kurt H. Becker ◽  
Abe Belkind ◽  
Jose L. Lopez ◽  
Y. Aranda Gonzalvo
Keyword(s):  
Hollow Cathode ◽  
Gas Flow ◽  
Hollow Cathode Discharge ◽  
Remote Plasma ◽  
Pulsed Dc

Self-heated hollow cathode discharge system for charged particle sources and plasma generators

2010 ◽  
Vol 81 (2) ◽  
pp. 02B305 ◽  
Author(s):  
V. I. Gushenets ◽  
A. S. Bugaev ◽  
E. M. Oks ◽  
P. M. Schanin ◽  
A. A. Goncharov
Keyword(s):  
Charged Particle ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Discharge System ◽  
Plasma Generators

Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition

2012 ◽  
Vol 30 (1) ◽  
pp. 01A139 ◽  
Author(s):  
Taeyong Park ◽  
Jaesang Lee ◽  
Jingyu Park ◽  
Heeyoung Jeon ◽  
Hyeongtag Jeon ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Plasma Treatment ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Ar Plasma

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics
Sign in / Sign up

Export Citation Format

Share Document