Low Power and High Sensitivity MOSFET-Based Pressure Sensor

2012 ◽  
Vol 29 (8) ◽  
pp. 088501 ◽  
Author(s):  
Zhao-Hua Zhang ◽  
Tian-Ling Ren ◽  
Yan-Hong Zhang ◽  
Rui-Rui Han ◽  
Li-Tian Liu
2015 ◽  
Vol 2015 ◽  
pp. 1-13 ◽  
Author(s):  
J. Sosa ◽  
Juan A. Montiel-Nelson ◽  
R. Pulido ◽  
Jose C. Garcia-Montesdeoca

A blood pressure sensor suitable for wireless biomedical applications is designed and optimized. State-of-the-art blood pressure sensors based on piezoresistive transducers in a full Wheatstone bridge configuration use low ohmic values because of relatively high sensitivity and low noise approach resulting in high power consumption. In this paper, the piezoresistance values are increased in order to reduce by one order of magnitude the power consumption in comparison with literature approaches. The microelectromechanical system (MEMS) pressure sensor, the mixed signal circuits signal conditioning circuitry, and the successive approximation register (SAR) analog-to-digital converter (ADC) are designed, optimized, and integrated in the same substrate using a commercial 1 μm CMOS technology. As result of the optimization, we obtained a digital sensor with high sensitivity, low noise (0.002 μV/Hz), and low power consumption (358 μW). Finally, the piezoresistance noise does not affect the pressure sensor application since its value is lower than half least significant bit (LSB) of the ADC.


2016 ◽  
Vol 5 (1) ◽  
pp. 95-112 ◽  
Author(s):  
Ali E. Kubba ◽  
Ahmed Hasson ◽  
Ammar I. Kubba ◽  
Gregory Hall

Abstract. Measuring air pressure using a capacitive pressure sensor is a robust and precise technique. In addition, a system that employs such transducers lies within the low power consumption applications such as wireless sensor nodes. In this article a high sensitivity with an elliptical diaphragm capacitive pressure sensor is proposed. This design was compared with a circular diaphragm in terms of thermal stresses and pressure and temperature sensitivity. The proposed sensor is targeted for tyre pressure monitoring system application. Altering the overlapping area between the capacitor plates by decreasing the effective capacitance area to improve the overall sensitivity of the sensor (ΔC ∕ C), temperature sensitivity, and built-up stresses is also examined in this article. Theoretical analysis and finite element analysis (FEA) were employed to study pressure and temperature effects on the behaviour of the proposed capacitive pressure sensor. A MEMS (micro electro-mechanical systems) manufacturing processing plan for the proposed capacitive sensor is presented. An extra-low power short-range wireless read-out circuit suited for energy harvesting purposes is presented in this article. The developed read-out circuitry was tested in terms of sensitivity and transmission range.


RSC Advances ◽  
2021 ◽  
Vol 11 (23) ◽  
pp. 13898-13905
Author(s):  
Chuan Cai ◽  
He Gong ◽  
Weiping Li ◽  
Feng Gao ◽  
Qiushi Jiang ◽  
...  

A three-dimensional electrospun carbon nanofiber network was used to measure press strains with high sensitivity.


2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  

2021 ◽  
Vol 53 (8) ◽  
Author(s):  
Hanglin Lu ◽  
Yalan Niu ◽  
Jian Tang ◽  
Li Yang ◽  
Laipeng Shao ◽  
...  

2020 ◽  
Vol 12 (1) ◽  
Author(s):  
Jung Joon Lee ◽  
Srinivas Gandla ◽  
Byeongjae Lim ◽  
Sunju Kang ◽  
Sunyoung Kim ◽  
...  

Abstract Conformal and ultrathin coating of highly conductive PEDOT:PSS on hydrophobic uneven surfaces is essential for resistive-based pressure sensor applications. For this purpose, a water-based poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) solution was successfully exchanged to an organic solvent-based PEDOT:PSS solution without any aggregation or reduction in conductivity using the ultrafiltration method. Among various solvents, the ethanol (EtOH) solvent-exchanged PEDOT:PSS solution exhibited a contact angle of 34.67°, which is much lower than the value of 96.94° for the water-based PEDOT:PSS solution. The optimized EtOH-based PEDOT:PSS solution exhibited conformal and uniform coating, with ultrathin nanocoated films obtained on a hydrophobic pyramid polydimethylsiloxane (PDMS) surface. The fabricated pressure sensor showed high performances, such as high sensitivity (−21 kPa−1 in the low pressure regime up to 100 Pa), mechanical stability (over 10,000 cycles without any failure or cracks) and a fast response time (90 ms). Finally, the proposed pressure sensor was successfully demonstrated as a human blood pulse rate sensor and a spatial pressure sensor array for practical applications. The solvent exchange process using ultrafiltration for these applications can be utilized as a universal technique for improving the coating property (wettability) of conducting polymers as well as various other materials.


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