Highly manufacturable silicon vertical diode switches for new memories using selective epitaxial growth with batch-type equipment

2011 ◽  
Vol 26 (5) ◽  
pp. 055022 ◽  
Author(s):  
K S Lee ◽  
J J Han ◽  
B H Kim ◽  
H J Lim ◽  
S W Nam ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth ◽  
Batch Type

Selective Epitaxial Growth of Silicon Layer Using Batch-Type Equipment for Vertical Diode Application to Next Generation Memories

2019 ◽  
Vol 28 (1) ◽  
pp. 281-286 ◽  
Author(s):  
Kong-Soo Lee ◽  
Dae-Han Yoo ◽  
Young-Sub Yoo ◽  
Jae-Jong Han ◽  
Seok-Sik Kim ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Silicon Layer ◽  
Next Generation ◽  
Selective Epitaxial Growth ◽  
Batch Type

Thick selective epitaxial growth of silicon at 960°C using silane only

1992 ◽  
Vol 18 (3) ◽  
pp. 237-246 ◽  
Author(s):  
N. Afshar-Hanaii ◽  
J.M. Bonar ◽  
A.G.R. Evans ◽  
G.J. Parker ◽  
C.M.K. Starbuck ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth

Selective epitaxial growth of silicon in pancake reactors

1988 ◽  
Vol 43 (8) ◽  
pp. 2031-2036 ◽  
Author(s):  
M. Kastelic ◽  
I. Oh ◽  
C.G. Takoudis ◽  
J.A. Friedrich ◽  
G.W. Neudeck
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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