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<p>An
optical rotary sensor based on laser self-mixing interferometry is proposed,
which enables noncontact and full-circle rotation measurement of non-cooperative
targets with high resolution and sensitivity. The prototype demonstrates that
the resolution is 0.1μrad and the linearity is 2.33×10<sup>-4</sup>. Stability of the prototype is 2μrad over
3600s and the repeatability error is below 0.84°under 9-gruop full-circle
tests. The theoretical resolution reaches up to 16nrad. Random rotation has
been successfully traced with a bionic hand to simulate the tremor process. Error
analysis and limitation discussion have been also carried out in the paper.
Although the accuracy needs further improvement compared with the best rotary
sensor, this method has its unique advantages of non-cooperative target
sensing, high sensitivity and electromagnetic immunity. Hence, the optical
rotary sensor provides a promising alternative in precise rotation measurement,
tremor tracing and nano-motion monitoring.</p>
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