Ion energy distribution control in single and dual frequency capacitive plasma sources

2005 ◽  
Vol 14 (1) ◽  
pp. 89-97 ◽  
Author(s):  
J K Lee ◽  
O V Manuilenko ◽  
N Yu Babaeva ◽  
H C Kim ◽  
J W Shon
Keyword(s):  
Energy Distribution ◽  
Dual Frequency ◽  
Ion Energy ◽  
Plasma Sources ◽  
Ion Energy Distribution

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

2007 ◽  
Vol 35 (5) ◽  
pp. 1229-1240 ◽  
Author(s):  
Tatyana V. Rakhimova ◽  
Oleg V. Braginsky ◽  
Vladimir V. Ivanov ◽  
Alexander S. Kovalev ◽  
Dmitry V. Lopaev ◽  
...  
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Theoretical Study ◽  
Energy Distribution Function ◽  
Dual Frequency ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Rf Discharges

The ion energy distribution in front of a negative wall

1992 ◽  
Vol 25 (4) ◽  
pp. 620-633 ◽  
Author(s):  
K -U Reimann ◽  
U Ehlemann ◽  
K Wiesemann
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution
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