The effect of low frequency pulse-shaped substrate bias on the remote plasma deposition of a-Si : H thin films

2009 ◽  
Vol 19 (1) ◽  
pp. 015012 ◽  
Author(s):  
I T Martin ◽  
M A Wank ◽  
M A Blauw ◽  
R A C M M van Swaaij ◽  
W M M Kessels ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Low Frequency ◽  
Substrate Bias ◽  
Remote Plasma ◽  
Frequency Pulse

Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films

1988 ◽  
Vol 60 (5) ◽  
pp. 815-820 ◽  
Author(s):  
M. R. Wertheimer ◽  
M. Moisan ◽  
J. E. Klemberg-Sapieha ◽  
R. Claude
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Low Frequency

Low‐pressure, low‐temperature, and remote‐plasma deposition of diamond thin films from water‐methanol mixtures

1992 ◽  
Vol 61 (24) ◽  
pp. 2863-2865 ◽  
Author(s):  
R. K. Singh ◽  
D. Gilbert ◽  
R. Tellshow ◽  
P. H. Holloway ◽  
R. Ochoa ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Plasma Deposition ◽  
Low Pressure ◽  
Remote Plasma ◽  
Diamond Thin Films

Influence of hydrogen dilution on surface roughness development of a-Si:H thin films grown by remote plasma deposition

2010 ◽  
pp. NA-NA ◽  
Author(s):  
M. A. Wank ◽  
A. Illiberi ◽  
F. D. Tichelaar ◽  
R. A. C. M. M. van Swaaij ◽  
M. C. M. van de Sanden ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Plasma Deposition ◽  
Remote Plasma ◽  
Hydrogen Dilution

Transmission Electron Microscopy studies of texture of Cr underlayer of magnetic recording hard disk

1991 ◽  
Vol 49 ◽  
pp. 580-581
Author(s):  
L. Tang ◽  
G. Thomas ◽  
M. R. Khan ◽  
S. L. Duan
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Magnetic Recording ◽  
Magnetic Thin Films ◽  
Magnetic Films ◽  
Substrate Bias ◽  
Epitaxial Relationship ◽  
Transmission Electron

Cr thin films are often used as underlayers for Co alloy magnetic thin films, such as Co1, CoNi2, and CoNiCr3, for high density longitudinal magnetic recording. It is belived that the role of the Cr underlayer is to control the growth and texture of the Co alloy magnetic thin films, and, then, to increase the in plane coercivity of the films. Although many epitaxial relationship between the Cr underlayer and the magnetic films, such as ﹛1010﹜Co/ {110﹜Cr4, ﹛2110﹜Co/ ﹛001﹜Cr5, ﹛0002﹜Co/﹛110﹜Cr6, have been suggested and appear to be related to the Cr thickness, the texture of the Cr underlayer itself is still not understood very well. In this study, the texture of a 2000 Å thick Cr underlayer on Nip/Al substrate for thin films of (Co75Ni25)1-xTix dc-sputtered with - 200 V substrate bias is investigated by electron microscopy.

Substrate bias effects during R-F sputtering of Y-Ba-Cu-O films

1990 ◽  
Vol 5 (4) ◽  
pp. 677-679 ◽  
Author(s):  
A. J. Drehman ◽  
M. W. Dumais
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Reactive Sputtering ◽  
Negative Bias ◽  
Superconducting Thin Films ◽  
Substrate Bias ◽  
Composition Control ◽  
Zero Resistance

Y-Ba-Cu-O films were made by R-F diode sputtering using a single oxide target. It was found that if a small negative bias is applied to the substrate, the etching associated with reactive sputtering is significantly reduced. This results in better composition control and uniformity, which are quite important for the formation of superconducting thin films. Films deposited on strontium titanate, when annealed in oxygen, become superconducting with zero resistance at 89 K.

Analysis of the substrate bias effect on the interface trapped charges in junctionless nanowire transistors through low-frequency noise characterization

2017 ◽  
Vol 178 ◽  
pp. 17-20 ◽  
Author(s):  
Rodrigo Trevisoli Doria ◽  
Renan Trevisoli ◽  
Michelly de Souza ◽  
Sylvain Barraud ◽  
Maud Vinet ◽  
...  
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Substrate Bias ◽  
Low Frequency Noise ◽  
Bias Effect ◽  
Nanowire Transistors ◽  
Noise Characterization

Preferential orientation and relaxation behaviors of CaCu3Ti4O12 thin films in a low frequency range

2017 ◽  
Vol 704 ◽  
pp. 676-682 ◽  
Author(s):  
Kang Sun ◽  
Ling-Fang Xu ◽  
Cong Mao ◽  
Xing Feng ◽  
Jia-Yu Liang ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Frequency ◽  
Preferential Orientation ◽  
Frequency Range
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