Negative ions and the role of metastable molecules in a capacitively coupled radiofrequency excited discharge in oxygen
2000 ◽
Vol 9
(3)
◽
pp. 323-330
◽
Keyword(s):
1989 ◽
Vol 12
(4)
◽
pp. 749-772
◽
2017 ◽
Vol 26
(12)
◽
pp. 124001
◽
2019 ◽
Vol 16
(11)
◽
pp. 1900093
◽
2009 ◽
Vol 43
(1)
◽
pp. 012003
◽
Keyword(s):
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4651-4655
◽
Keyword(s):