Investigation on the composition and structure of silicon nitride film prepared by ECR-PECVD
1994 ◽
Vol 3
(9)
◽
pp. 682-689
◽
Keyword(s):
Keyword(s):
Keyword(s):
2017 ◽
Vol 68
◽
pp. 334-338
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1971 ◽
Vol 10
(12)
◽
pp. 1675-1679
◽
Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 1B)
◽
pp. 462-468
◽
2001 ◽
Vol 188
(1)
◽
pp. 175-178
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