Silicon nitride film formed by NH 3 plasma-enhanced thermal nitridation
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1994 ◽
Vol 3
(9)
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pp. 682-689
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2017 ◽
Vol 68
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pp. 334-338
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1971 ◽
Vol 10
(12)
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pp. 1675-1679
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Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 1B)
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pp. 462-468
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2001 ◽
Vol 188
(1)
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pp. 175-178
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