Experimental Study of the Effect of Applied Magnetic Field on Plasma Properties of Unbalanced Magnetron Sputtering

2010 ◽  
Vol 12 (5) ◽  
pp. 571-576 ◽  
Author(s):  
Mu Zongxin ◽  
Wang Chun ◽  
Mu Xiaodong ◽  
Jia Li ◽  
Liu Shengguang ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Experimental Study ◽  
Magnetron Sputtering ◽  
Applied Magnetic Field ◽  
Plasma Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

A small unbalanced magnetron sputtering source with multipole magnetic field anode

1994 ◽  
Vol 65 (4) ◽  
pp. 1331-1333 ◽  
Author(s):  
Sixiao Zheng ◽  
Guanqing Sun ◽  
Peilu Wang ◽  
Xiaodong Liao
Keyword(s):  
Magnetic Field ◽  
Magnetron Sputtering ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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