Modification mechanisms of silicon thin films in low-temperature hydrogen plasmas

2018 ◽  
Vol 52 (5) ◽  
pp. 055204 ◽  
Author(s):  
V Martirosyan ◽  
O Joubert ◽  
E Despiau-Pujo
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Silicon Thin Films ◽  
Hydrogen Plasmas

scholarly journals Effect of Halogen on the Structure of Low Temperature Polycrystalline Silicon Thin Films Fabricated on Glass Substrates.

1999 ◽  
Vol 107 (1251) ◽  
pp. 1099-1104 ◽  
Author(s):  
Toshio KAMIYA ◽  
Yoshiteru MAEDA ◽  
Kouichi NAKAHATA ◽  
Takashi KOMARU ◽  
Charles M. FORTMANN ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films

scholarly journals Low temperature epitaxial growth of boron-doped silicon thin films

2018 ◽  
Author(s):  
Marta Chrostowski ◽  
Rafaël Peyronnet ◽  
Wanghua Chen ◽  
Nicolas Vaissiere ◽  
José Alvarez ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Silicon Thin Films ◽  
Boron Doped ◽  
Doped Silicon

Sequential lateral solidification of silicon thin films on low-k dielectrics for low temperature integration

2014 ◽  
Vol 105 (24) ◽  
pp. 242904 ◽  
Author(s):  
Fabio Carta ◽  
Stephen M. Gates ◽  
Alexander B. Limanov ◽  
Htay Hlaing ◽  
James S. Im ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Silicon Thin Films ◽  
Sequential Lateral Solidification ◽  
Low K
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