Uncertainty in the mutual calibration method for the traceable thickness measurement of ultra-thin oxide films

Metrologia ◽  
2021 ◽  
Vol 58 (3) ◽  
pp. 034002
Author(s):  
Seung Mi Lee ◽  
Jin Chun Woo ◽  
Tae Gun Kim ◽  
Kyung Joong Kim
2007 ◽  
Vol 19 (24) ◽  
pp. NA-NA
Author(s):  
M. Takahashi ◽  
T. Maeda ◽  
K. Uemura ◽  
J. Yao ◽  
Y. Tokuda ◽  
...  

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