Fabrication of probe tips via the FIB method for nanodiagnostics of the surface of solids by atomic force microscopy
2021 ◽
Vol 2086
(1)
◽
pp. 012204
Keyword(s):
Ion Beam
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Abstract In this work, we carried out an investigation of commercial atomic force microscope (AFM) probes for contact and semi-contact modes, which were modified by focused ion beam (FIB). This method was used to modify the original tip shape of silicon AFM probes, by ion-etching and ion-enhance gas deposition. we show a better performance of the FIB-modified probes in contrast with the non-modified commercial probes. These results were obtained after using both probes in semi-contact mode in a calibration grating sample.
High aspect ratio all diamond tips formed by focused ion beam for conducting atomic force microscopy
1999 ◽
Vol 17
(4)
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pp. 1570
◽
Keyword(s):
Ion Beam
◽
1994 ◽
Vol 24
(1-3)
◽
pp. 223-225