scholarly journals Gas Barrier Properties of Diamond-like Carbon Films Synthesized by Using Remote Type Microwave Plasma CVD under Sub-ambient Atmospheric Pressure

2013 ◽  
Vol 417 ◽  
pp. 012043 ◽  
Author(s):  
Y Tachimoto ◽  
M Noborisaka ◽  
A Shirakura ◽  
C Kuroyanagi ◽  
T Suzuki
Keyword(s):  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Barrier Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Gas Barrier ◽  
Microwave Plasma Cvd ◽  
Gas Barrier Properties

Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD

2010 ◽  
Vol 204 (16-17) ◽  
pp. 2817-2821 ◽  
Author(s):  
Sambita Sahoo ◽  
Swati S. Pradhan ◽  
Venkateswarlu Bhavanasi ◽  
S.K. Pradhan
Keyword(s):  
Mechanical Characterization ◽  
Microwave Plasma ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Gas barrier properties of diamond-like carbon films coated on PTFE

2009 ◽  
Vol 255 (16) ◽  
pp. 7286-7290 ◽  
Author(s):  
K. Ozeki ◽  
I. Nagashima ◽  
Y. Ohgoe ◽  
K.K. Hirakuri ◽  
H. Mukaibayashi ◽  
...  
Keyword(s):  
Barrier Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Gas Barrier ◽  
Gas Barrier Properties

scholarly journals Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

2007 ◽  
Vol 30 (6) ◽  
pp. 541-546 ◽  
Author(s):  
R. M. Dey ◽  
M. Pandey ◽  
D. Bhattacharyya ◽  
D. S. Patil ◽  
S. K. Kulkarni
Keyword(s):  
Microwave Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Carbon Coatings ◽  
Microwave Plasma Cvd

Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window

2006 ◽  
Vol 15 (4-8) ◽  
pp. 913-916 ◽  
Author(s):  
Sudip Adhikari ◽  
Ashraf M.M. Omer ◽  
Sunil Adhikary ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Microwave Plasma ◽  
Wave Mode ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films
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