scholarly journals Investigation of an electrostatically actuated imperfect circular microplate under transverse pressure for pressure sensor applications

2021 ◽  
Author(s):  
Mainakh Das ◽  
Anand Bhushan
Keyword(s):  
Pressure Sensor ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Reduced Order ◽  
Static And Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Sensor Applications ◽  
Transverse Pressure ◽  
Element Simulation ◽  
Circular Microplate

Abstract In this paper, we present static and dynamic analysis of an electrostatically actuated imperfect circular microplate under transverse pressure. In modelling of the microplate, we have included both von Kármán geometric and electrostatic force nonlinearities in the development of the equation of motion. The equation of motion has been solved using Galerkin based reduced order modelling technique. The developed reduced order model has been first validated by comparing it with finite element simulation results. Further, the effects of imperfection as initial curvature and uniform transverse pressure have been investigated on the static and dynamic characteristics of the electrostatically actuated circular microplate. We have also investigated the effects of imperfection and applied DC voltage on the pressure sensitivity of the circular microplate. We have found that both imperfection and electrostatic load are responsible for appreciable variations in sensitivity. This detailed investigation is useful to design an imperfect micro pressure sensor.

Reduced Order Model of MEMS Sensors Near Natural Frequency

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.

Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

Nonlinear Dynamics of MEMS Arches

2010 ◽  
Author(s):  
Sami Alkharabsheh ◽  
Mohammad Younis
Keyword(s):  
Electrostatic Force ◽  
Equations Of Motion ◽  
Amplitude Dependence ◽  
Harmonic Load ◽  
Order Model ◽  
Shooting Technique ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Dynamic Phenomena ◽  
Unstable States

In this paper, the dynamic response of electrostatically actuated clamped-clamped arch microbeam is investigated when excited by a DC load superimposed to an AC harmonic load. The dynamic analysis is carried out using a Galerkin-based reduced order model along with a shooting technique to find periodic motions and analyzing its stability using a Floquet theory. Results are presented for the cases of primary and super harmonic resonances. We found several nonlinear dynamic phenomena due to the inherent nonlinear electrostatic force and geometric nonlinearity of the arch. These include frequency-amplitude dependence, jumps, tangent bifurcations, coexistence of solutions, and softening and hardening behaviors. The shooting technique showed high robustness in capturing both the stable and unstable states of the system. Hence, it helped clarify vague behaviors that were previously reported using longtime integration of the equations of motion.

Reduced Order Model on DC Bias Effect on the Frequency Response of Electrostatically Actuated Biosensor Microplates

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Alternate Current ◽  
Reduced Order Model ◽  
Order Model ◽  
Bias Effect ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Ground Plate ◽  
Dc Bias

This paper investigates the frequency response of microplates under electrostatic actuation. The microplate is parallel to a fixed ground plate. The electrostatic force that actuates the system is given by both Alternate Current (AC) and Direct Current (DC) voltages. The AC frequency is set to be near half natural frequency of the structure. Damping influence is also investigated in this paper. The method of investigation is Reduced Order Model. The effects of various parameters on the response of the structure are reported.

Symmetry Breaking in an Initially Curved Micro Beam Loaded by a Distributed Electrostatic Force

2012 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Symmetry Breaking ◽  
Degrees Of Freedom ◽  
Electrostatic Force ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Straight Beam ◽  
Base Functions ◽  
Approximate Expressions ◽  
Symmetric Response ◽  
Good Agreement

The asymmetric buckling of a shallow initially curved stress-free micro beam subjected to distributed nonlinear deflection-dependent electrostatic force is studied. The analysis is based on a two degrees of freedom reduced order (RO) model, resulting from the Galerkin decomposition with linear undamped eigen-modes of a straight beam used as the base functions. Simple approximate expressions are derived defining the geometric parameters of beams for which an asymmetric response bifurcates from the symmetric one. The necessary criterion establishes the conditions for the appearance of bifurcation points on the unstable branch of the symmetric response curve; the sufficient criterion assures a realistic asymmetric buckling bifurcating from the stable branches of the curve. It is shown that while the symmetry breaking conditions are affected by the nonlinearity of the electrostatic force, its influence is less pronounced than in the case of the symmetric snap-through criterion. A comparison between the RO model results and those obtained by direct numerical analysis shows good agreement between the two and indicates that the obtained criteria can be used to predict non-symmetric buckling in electrostatically actuated bistable micro beams.

Sensitivity of MEMS/NEMS Biosensors Near Twice Natural Frequency

2010 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Direct Approach ◽  
Mass Detection ◽  
Electrostatically Actuated ◽  
Phase Amplitude

Bio-MEMS/NEMS resonator sensors near twice natural frequency for mass detection are investigated. Electrostatic force along with fringe correction and Casimir effect are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. Phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are reported.

scholarly journals Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 930
Author(s):  
Hassen M. Ouakad ◽  
Nouha Alcheikh ◽  
Mohammad I. Younis
Keyword(s):  
Expansion Method ◽  
Geometrical Parameters ◽  
Parallel Plates ◽  
Reduced Order ◽  
Shallow Arches ◽  
Static And Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Static Responses ◽  
Wide Range ◽  
Electrically Actuated

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin’s expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode’s configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators.

Response of Electrostatically Actuated Sensors Near Half of the Natural Frequency

2009 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Governing Equation ◽  
Multiple Scales ◽  
Equation Of Motion ◽  
Casimir Forces ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Micro Sensor ◽  
Phase Amplitude

A cantilever micro-resonator electrostatically actuated near half of the natural frequency is investigated. Hamilton’s principle is used to derive the partial-differential equation of motion for a general non-uniform sensor. Nonlinearities arise due to the electrostatic and Casimir forces. The electrostatic actuation introduces parametric coefficients in both linear and nonlinear parts of the governing equation. A direct approach is taken using the method of multiple scales resulting in a phase-amplitude relationship for the system. Numerical results for a uniform capacitive resonator micro-sensor are provided and tested numerically using a reduced-order model of the governing equation of motion.

Reduced Order Model of CNT Cantilever Resonators Under AC Voltage Near Half Natural Frequency

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Damping Force ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model method. The system consists of a CNT parallel to a ground plate. An alternating current (AC) voltage is considered between the two. The CNT undergoes an oscillatory motion due to the electrostatic force generated by the voltage. Another two forces act on the CNT, namely a damping force, and a van der Waals force due to gaps less than 50 nm. The Method of Multiple Scales (MMS) and the Reduced Order Model (ROM) method (using AUTO solver) are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency response is found in the case of AC near half natural frequency.

Limit Points Behavior in Electrostatically Actuated Initially Curved Micro Plate

2016 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Degrees Of Freedom ◽  
Mechanical Load ◽  
Electrostatic Force ◽  
Equilibrium Path ◽  
Buckling Modes ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Base Functions ◽  
Three Degrees Of Freedom ◽  
Good Agreement

The axisymmetric snap-through of an initially curved circular micro plate, subjected to a transversal distributed electrostatic force is studied. The analysis is based on a reduced order (RO) model resulting from the Galerkin decomposition, with buckling modes of a flat plate used as the base functions. In order to check the validity of the RO model, the corresponding problem for a displacement-independent (“mechanical”) load is solved, and a comparison between the RO model and those obtained using finite elements (FE) analysis is carried out. It is shown, that the two are in good agreement, indicating that the RO model can be used for a plate undergoing electrostatic loading. However, the study shows that at least three degrees of freedom (DOF) are required for an accurate prediction of the equilibrium path and bistability. The coupled electromechanical analysis shows that due to the nonlinearity of the electrostatic load, the snap-through occurs at a lower displacement than in the case of the “mechanical” load. Moreover, the study concludes that actuation of plates of realistic dimensions can be achieved by reasonably low voltages.

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