Damage-less observation of polymers by electron dose control in scanning electron microscope

Microscopy ◽  
2021 ◽  
Author(s):  
Yoichiro Hashimoto ◽  
Kunji Shigeto ◽  
Ryo Komatsuzaki ◽  
Tsutomu Saito ◽  
Takashi Sekiguchi
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Radiation Damage ◽  
Signal To Noise Ratio ◽  
Sem Images ◽  
Rapid Reduction ◽  
Electron Dose ◽  
Sem Image ◽  
Dose Control ◽  
Scanning Electron

Abstract Methodology for quantitative evaluation of electron radiation damage and calculation of tolerable electron dose was developed to achieve damage-less scanning electron microscope (SEM) observation of beam-sensitive polymer film. The radiation damage is typically evaluated with visual impressions of SEM images; however, this method may be unreliable because observer’s subjectivity may affect the results. Evaluation with quantitative value is crucial to improve reliability. In this study, the radiation damage was evaluated by using normalized correlative coefficient (RNCC) between an initial frame and latter frames of the multiple SEM images that were taken consecutively. Tolerable dose was obtained by defining a threshold point of RNCC where rapid reduction of RNCC started. A SEM image with less damage and acceptable signal-to-noise ratio was obtained by integrating the images from the initial frame to the tolerable frame.

Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images

2008 ◽  
Vol 381-382 ◽  
pp. 299-300 ◽  
Author(s):  
Y. Li ◽  
Li Jiang Zeng
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Diffraction Efficiency ◽  
Contour Line ◽  
Sem Images ◽  
Sem Image ◽  
Grating Fabrication ◽  
Microscope Images ◽  
Scanning Electron

Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.

Thick photoresists for electroforming metallic microcomponents

2008 ◽  
Vol 222 (1) ◽  
pp. 37-42 ◽  
Author(s):  
X Wei ◽  
C-H Lee ◽  
Z Jiang ◽  
K Jiang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Current Paper ◽  
Sem Images ◽  
Advantages And Disadvantages ◽  
Uv Lithography ◽  
Electroforming Process ◽  
Electroformed Nickel ◽  
Scanning Electron

Recently, microelectroforming has been extensively applied to fabricating metallic components for sensors, actuators, and other systems. Thick photoresists are used for making micromoulds for electroforming and closely related to the quality and costs of an electroforming process. In the current paper, thick UV photoresists SU8, BPR100, and KMPR are analysed and compared in their electroforming performance of nickel microcomponents. Optimized UV lithography processes are introduced for producing micromoulds in each of the resists and scanning electron microscope (SEM) images of the moulds are presented and analysed. Then, electroformed nickel components from the micromoulds are presented. Finally, applicability of the photoresists to electroforming microcomponents is discussed. Each of the resists demonstrates advantages and disadvantages to suit different applications.

PET Depolymerization Catalyzed by Sulfates under Microwave Irradiation

2012 ◽  
Vol 550-553 ◽  
pp. 792-797 ◽  
Author(s):  
Wei Lu Zhang ◽  
Xiao Ni Shi ◽  
Xin Zhang ◽  
Chun Hua Han ◽  
Dong Zhang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Microwave Irradiation ◽  
Polyethylene Terephthalate ◽  
Sem Images ◽  
Scanning Electron

Different sulfates were used as the catalysts of polyethylene terephthalate (PET) depolymerization under microwave of 250 watts, in which ZnSO4presented the best catalysis in this reaction, and the depolymerization degree (DPD) of PET was reached to 90 %. It was found that the depolymerization was occurred simultaneously on the surface and the internal parts of PET chips by the observation of scanning electron microscope (SEM) images. In addition, DPD increased with the improvement of the polarization forces of these sulfates.

Observation of Semiconductor Superstructures With Backscattered Electrons in a Scanning Electron Microscope

1994 ◽  
Vol 354 ◽  
Author(s):  
A. Bosacchi ◽  
S. Franchi ◽  
D. Govoni ◽  
G. Mattei ◽  
P.G. Merli ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Signal To Noise Ratio ◽  
Beam Size ◽  
Signal To Noise ◽  
Backscattered Electrons ◽  
Imaging Mode ◽  
Noise Ratio ◽  
Scanning Electron

AbstractObservations of semiconductor superstructures with backscattered electrons in a scanning electron microscope have been used to revisit the concept of resolution of the backscattering imaging mode. It will be shown that the generation volume doesn't represent in itself a limit to the resolution, which depends only on the beam size and the signal to noise ratio.

scholarly journals QUALITY REINFORCEMENT OF ELECTROPLATING ZINC COATINGSELECTRODEPOSITED FROM CYANIDE FREE ALKALINE SOLUTION BY POLYAMINE 70.000 AND POLYVINYL ALCOHOL 16.000

2018 ◽  
Vol 55 (5B) ◽  
pp. 18
Author(s):  
Truong Thi Nam
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Polyvinyl Alcohol ◽  
Zinc Coating ◽  
Alkaline Solutions ◽  
Zinc Ions ◽  
Sem Images ◽  
Zinc Coatings ◽  
Scanning Electron ◽  
Good Agreement

Zinc coatings have been deposited electrochemically from cyanine free alkaline solutions containing zinc ions with the presence of polyamine 70.000 and polyvinyl alcohol at different contents. The scanning electron microscope (SEM) images showed that the size of zinc grains decreased with the presence of polyamine 70.000 and polyvinyl alcohol with smoother surface of zinc coating. The polarization measurements also revealed that the coatings with the presence of polyamine or polyvinyl alcohol possessed higher value of polarity degree. This result is in good agreement with the result obtained from SEM images.

Stroboscopic testing of LSIs with LVSEM

1984 ◽  
Vol 42 ◽  
pp. 464-467
Author(s):  
H. Todokoro ◽  
S. Yoneda ◽  
K. Yamaguchi
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Radiation Damage ◽  
Packing Density ◽  
Low Voltage ◽  
Low Energy ◽  
Electron Radiation ◽  
Optical Aberration ◽  
Voltage Scanning ◽  
Scanning Electron

Recently, the low-voltage scanning electron microscope (LVSEM) has become the center of wide interest. This is because the SEM has become an indispensable instrument in the field of semiconductor production, where packing density is increasing and device geometry is shrinking to a few microns or less. However, application of the SEM in the semiconductor industries presents two serious problems: (i) electron radiation damage to transistor functions and (ii) charge-up of electrons on insulators. Various reports concerning electron radiation damage have been published (1,2,3), and it has been found that electron energy must be less than 2 kV to minimize radiation damage. Such low energy also avoids the charge-up effect. However, it is quite difficult to get a fine probe at such low energy due to insufficient source brightness and electron optical aberration.

Performance enhancement of Scanning Electron Microscope using a Deep Convolutional Neural Network

2022 ◽  
Author(s):  
Suresh Panchal ◽  
Unnikrishnan Gopinathan ◽  
Suwarna Datar
Keyword(s):  
Neural Network ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Convolutional Neural Network ◽  
Performance Enhancement ◽  
Deep Convolutional Neural Network ◽  
Sem Images ◽  
Scan Rate ◽  
Charging Effect ◽  
Scanning Electron

Abstract We report noise reduction and image enhancement in Scanning Electron Microscope (SEM) imaging while maintaining a Fast-Scan rate during imaging, using a Deep Convolutional Neural Network (D-CNN). SEM images of non-conducting samples without conducting coating always suffer from charging phenomenon, giving rise to SEM images with low contrast or anomalous contrast and permanent damage to the sample. One of the ways to avoid this effect is to use Fast-Scan mode, which suppresses the charging effect fairly well. Unfortunately, this also introduces noise and gives blurred images. The D-CNN has been used to predict relatively noise-free images as obtained from a Slow-Scan from a noisy, Fast-Scan image. The predicted images from D-CNN have the sharpness of images obtained from a Slow-Scan rate while reducing the charging effect due to images obtained from Fast-Scan rates. We show that using the present method, and it is possible to increase the scanning rate by a factor of about seven with an output of image quality comparable to that of the Slow-Scan mode. We present experimental results in support of the proposed method.

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