STEM imaging of 47-pm-separated atomic columns by a spherical aberration-corrected electron microscope with a 300-kV cold field emission gun

2009 ◽  
Vol 58 (6) ◽  
pp. 357-361 ◽  
Author(s):  
H. Sawada ◽  
Y. Tanishiro ◽  
N. Ohashi ◽  
T. Tomita ◽  
F. Hosokawa ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Spherical Aberration ◽  
Aberration Corrected

scholarly journals Structural Analysis at an Atomic Scale Using Spherical Aberration Corrected Electron Microscope

2012 ◽  
Vol 54 (3) ◽  
pp. 159-165
Author(s):  
Yoshifumi OSHIMA ◽  
Yasumasa TANISHIRO ◽  
Takayuki TANAKA ◽  
Kunio TAKAYANAGI
Keyword(s):  
Electron Microscope ◽  
Structural Analysis ◽  
Spherical Aberration ◽  
Atomic Scale ◽  
Aberration Corrected

Electrostatic Aberration Correction in LV-SEM

2000 ◽  
Vol 6 (S2) ◽  
pp. 746-747 ◽  
Author(s):  
D.J. Maas ◽  
A. Henstra ◽  
M.P.C.M. Krijn ◽  
S.A.M. Mentink
Keyword(s):  
Electron Microscope ◽  
Low Voltage ◽  
State Of The Art ◽  
Spherical Aberration ◽  
Positive Definite ◽  
Ease Of Use ◽  
Objective Lens ◽  
Time Varying ◽  
Voltage Electron ◽  
Aberration Corrected

The resolution of a low-voltage electron microscope is limited by the chromatic and spherical aberration of the objective lens, see Fig. 1. The design of state-of-the-art objective lenses is optimised for minimal aberrations. Any significant improvement of the resolution requires an aberration corrector. Recently, correction of both Cc and Cs has been demonstrated in SEM, using a combination of magnetic and electrostatic quadrupoles and octupoles (Zach and Haider, 1995). The present paper presents an alternative design, which is based on a purely electrostatic concept, potentially simplifying the ease-of-use of an aberration corrected microscope.In 1936 Scherzer showed that the fundamental lens aberrations of round lenses are positive definite, in absence of time-varying fields and/or space charge. Negative lens aberrations, required for the correction of Cc and Cs, can only be obtained using non-round lenses, e.g. quadrupoles and octupoles (Scherzer, 1947).

scholarly journals Development of Pulse Magnetization System on Aberration Corrected 1.2-MV Cold Field-Emission Transmission Electron Microscope

2016 ◽  
Vol 22 (S3) ◽  
pp. 1702-1703 ◽  
Author(s):  
Toshiaki Tanigaki ◽  
Tetsuya Akashi ◽  
Akira Sugawara ◽  
Kodai Niitsu ◽  
Xiuzhen Yu ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Pulse Magnetization ◽  
Transmission Electron ◽  
Aberration Corrected

Future trends in aberration-corrected electron microscopy

2009 ◽  
Vol 367 (1903) ◽  
pp. 3809-3823 ◽  
Author(s):  
Harald H. Rose
Keyword(s):  
Electron Microscope ◽  
Low Voltage ◽  
Spherical Aberration ◽  
Scattered Wave ◽  
Objective Lens ◽  
Phase Plate ◽  
Resolution Limit ◽  
Instrumental Resolution ◽  
Atom Displacement ◽  
Aberration Corrected

The attainable specimen resolution is determined by the instrumental resolution limit d i and by radiation damage. Solid objects such as metals are primarily damaged by atom displacement resulting from knock-on collisions of the incident electrons with the atomic nuclei. The instrumental resolution improves appreciably by means of aberration correction. To achieve atomic resolution at voltages below approximately 100 kV and a large number of equally resolved image points, we propose an achromatic electron–optical aplanat, which is free of chromatic aberration, spherical aberration and total off-axial coma. Its anisotropic component is eliminated either by a dual objective lens consisting of two separate windings with opposite directions of their currents or by skew octopoles employed in the TEAM corrector. We obtain optimum imaging conditions by operating the aberration-corrected electron microscope at voltages below the knock-on threshold for atom displacement and by shifting the phase of the non-scattered wave by π /2 or that of the scattered wave by − π /2. In this negative contrast mode, the phase contrast and the scattering contrast add up with the same sign. The realization of a low-voltage aberration-corrected phase transmission electron microscope for the visualization of radiation-sensitive objects is the aim of the proposed SALVE (Sub-Å Low-Voltage Electron microscope) project. This microscope will employ a coma-free objective lens, an obstruction-free phase plate and a novel corrector compensating for the spherical and chromatic aberrations.

scholarly journals Performance and Application of an Aberration Corrected Analytical Electron Microscope with a Cold Field Emission Gun

2011 ◽  
Vol 17 (S2) ◽  
pp. 1162-1163
Author(s):  
Y Kohno ◽  
E Okunishi ◽  
I Ishikawa ◽  
T Tomita ◽  
T Kaneyama ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

First application of a spherical‐aberration corrected transmission electron microscope in materials science

2002 ◽  
Vol 51 (suppl 1) ◽  
pp. S51-S58 ◽  
Author(s):  
Bernd Kabius ◽  
Max Haider ◽  
Stefan Uhlemann ◽  
Eugen Schwan ◽  
Knut Urban ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Materials Science ◽  
Spherical Aberration ◽  
Transmission Electron ◽  
Aberration Corrected
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