Mechanism of HF etching of silicon surfaces: A theoretical understanding of hydrogen passivation
1990 ◽
Vol 65
(4)
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pp. 504-507
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1991 ◽
Vol 66
(12)
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pp. 1647-1647
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1998 ◽
Vol 57
(20)
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pp. 13295-13304
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Keyword(s):
1993 ◽
Vol 07
(04)
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pp. 1031-1078
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1994 ◽
Vol 141
(11)
◽
pp. 3128-3136
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2021 ◽
pp. 75-114
Keyword(s):
1988 ◽
Vol 46
◽
pp. 624-625
2019 ◽
Vol 1
(2)
◽
pp. 131-143
2019 ◽
Vol 86
(3)
◽
pp. 77-90