Hydrogen Passivation of  HF  ‐ Last Cleaned (100) Silicon Surfaces Investigated by Multiple Internal Reflection Infrared Spectroscopy

1994 ◽  
Vol 141 (11) ◽  
pp. 3128-3136 ◽  
Author(s):  
H. Bender ◽  
S. Verhaverbeke ◽  
M. M. Heyns
2003 ◽  
Vol 0 (8) ◽  
pp. 2961-2965 ◽  
Author(s):  
N. Rochat ◽  
K. Dabertrand ◽  
V. Cosnier ◽  
S. Zoll ◽  
P. Besson ◽  
...  

1987 ◽  
Vol 104 ◽  
Author(s):  
K. Bergman ◽  
Michael Stavola ◽  
S. J. Pearton ◽  
J. Lopata

ABSTRACTInfrared spectroscopy has been used to study hydrogen passivation of P, As, and Sb donors in Si. The spectra show several new absorption bands due to donor-H complexes. By comparing spectra after different heat treatments it is shown directly that the passivation is due to complex formation.


Author(s):  
R. J. Jackman ◽  
K. T. Queeney ◽  
R. Herzig-Marx ◽  
M. A. Schmidt ◽  
K. F. Jensen

1999 ◽  
Vol 5 (S2) ◽  
pp. 66-67
Author(s):  
Andre’ J. Sommer ◽  
Mark Hardgrove

Over the past several years many developments have taken place in the field of molecular spectroscopy. For Raman spectroscopy many of the improvements have arisen from technological innovations that include diode-based lasers, holographic notch filters and charged coupled detectors. In contrast, a majority of the developments in infrared spectroscopy have been in the area of new sampling accessories. A major emphasis has been placed on attenuated total internal reflection (ATR) accessories. The devices are allowing infrared spectroscopy to be employed in process control environments and quality control laboratories where the method is not only robust but has the advantages of limited sample preparation and/or in situ analysis.In the realm of microspectroscopy, ATR accessories have the added advantages of providing better spatial resolution, equal to or higher S/N for equivalent sample size compared to transmission measurements and most importantly the ability to collect spectra of small samples without the adverse effect of diffraction. One accessory which was developed several years ago is known as the Split-Pea.


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