Two-dimensional simulation of inductive plasma sources with self-consistent power deposition
1995 ◽
Vol 23
(4)
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pp. 558-562
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Keyword(s):
1997 ◽
Vol 6
(2)
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pp. 231-239
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2002 ◽
Vol 11
(3)
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pp. 260-265
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Keyword(s):
1983 ◽
Vol 31
(11)
◽
pp. 898-904
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Keyword(s):
2006 ◽
Vol 53
(9)
◽
pp. 2364-2369
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Keyword(s):
2003 ◽
Vol 125
(17)
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pp. 5227-5235
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1991 ◽
Vol 34
(4)
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pp. 397-401
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Keyword(s):