Electron cyclotron resonance hydrogen and nitrogen plasma surface passivation of AlGaAs/GaAs heterojunction bipolar transistors

1992 ◽  
Vol 13 (2) ◽  
pp. 83-85 ◽  
Author(s):  
Q. Wang ◽  
P.W. Li ◽  
R.M. Osgood ◽  
W.I. Wang ◽  
E.S. Yang ◽  
...  
Keyword(s):  
Heterojunction Bipolar Transistors ◽  
Cyclotron Resonance ◽  
Surface Passivation ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Bipolar Transistors ◽  
Electron Cyclotron ◽  
Plasma Surface

ChemInform Abstract: A WSixN Diffusion Barrier Formed with Electron Cyclotron Resonance Nitrogen Plasma.

ChemInform ◽  
2010 ◽  
Vol 28 (12) ◽  
pp. no-no
Author(s):  
A. HIRATA ◽  
T. HOSOYA ◽  
K. MACHIDA ◽  
H. TAKAOKA ◽  
H. AKIYA
Keyword(s):  
Diffusion Barrier ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Electron Cyclotron
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