DC to radio-frequency characterization of ZrO2 dielectric for “Metal-Insulator-Metal” integrated capacitors

Author(s):  
T. Bertaud ◽  
C. Vallee ◽  
C. Bermond ◽  
T. Lacrevaz ◽  
B. Flechet ◽  
...  
2010 ◽  
pp. NA-NA
Author(s):  
C. Zúñiga-I. ◽  
A. Kosarev ◽  
A. Torres-J. ◽  
P. Rosales-Q. ◽  
W. Calleja-A. ◽  
...  

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