Study of micro-scale limits of solder self-assembly for MEMS

Author(s):  
K.F. Harsh ◽  
V.M. Bright ◽  
Y.C. Lee
Keyword(s):  
Ionics ◽  
2021 ◽  
Vol 27 (4) ◽  
pp. 1611-1618
Author(s):  
Xiaowen Ge ◽  
Xiaomei Du ◽  
Yin Sun ◽  
Junjie Zhang ◽  
Zhongyu Qiu ◽  
...  

Sensors ◽  
2018 ◽  
Vol 18 (9) ◽  
pp. 2824 ◽  
Author(s):  
Kunpeng Feng ◽  
Jiwen Cui ◽  
Xun Sun ◽  
Hong Dang ◽  
Tangjun Shi ◽  
...  

Three-dimensional micro-scale sensors are in high demand in the fields of metrology, precision manufacturing and industry inspection. To extend the minimum measurable dimension and enhance the accuracy, a tapered four-cores fiber Bragg grating (FBG) probe is proposed. The sensing model is built to investigate the micro-scale sensing characteristics of this method and the design of the tapered stylus is found to influence the accuracy. Therefore, a π/2 phase-shift point is introduced into the FBGs comprised in the probe to suppress spectrum distortion and improve accuracy. Then, the manufacturing method based on capillary self-assembly is proposed to form the probe and the critical length to form a square array for four cylindrical fibers is verified to be effective for the tapered fibers. Experimental results indicate that the design of the tapered stylus can extend the minimum measurable dimension by twofold and has nearly no influence on its sensitivity. The three-dimensional measurement repeatability is better than 31.1 nm and the stability is better than 200 nm within once measuring process. Furthermore, the measurement precision of the three-dimensional micro-scale measurement results is less than 150 nm. It would be widely used in measuring micro-scale features for industry inspection or metrology.


2002 ◽  
Vol 739 ◽  
Author(s):  
H. McNally ◽  
S. W. Lee ◽  
D. Guo ◽  
M. Pingle ◽  
D. Bergstrom ◽  
...  

ABSTRACTBio-inspired assembly, through the use of bio-molecules such as DNA and proteins, will play a critical role in the advancement of novel sensing techniques and for the realization of heterogeneous integration of materials. For many of these applications, such as antibody-based biosensor and the study of controlled cell growth, DNA and protein patterning techniques are crucial. We will present an update of our work on protein patterning techniques using microelectronic fabrication, DNA hybridization and biotin-streptavidin pairing. To show its application in biological inspired self-assembly, this technique was used successfully in the self-assembly of 20 nm streptavidin conjugated gold particles. In addition, the integration of nano-and micro-scale heterogeneous materials is very important for novel material synthesis and electro-optic applications. We will present an update on our work to assemble silicon electronic devices using DNA/charged molecules and electric fields. Devices are fabricated, released, charged with molecules, and subsequently manipulated in electric fields. The techniques described can be used to integrate the hybrid devices such as nano- or micro-scale resistors, PN diodes, and MOSFETs on silicon or other substrates such as glass, plastic, etc.


2014 ◽  
Vol 50 (38) ◽  
pp. 4881-4883 ◽  
Author(s):  
Gloria Modugno ◽  
Zois Syrgiannis ◽  
Aurelio Bonasera ◽  
Mauro Carraro ◽  
Gabriele Giancane ◽  
...  

The host–guest chemistry of the POM-tweezer drives self-assembly with carbon nanostructures in the nano- to micro-scale yielding 0-, 1-, and 2-D nano-hybrids.


2016 ◽  
Vol 22 (S3) ◽  
pp. 1912-1913 ◽  
Author(s):  
Shaobo Han ◽  
Wei Liu ◽  
Kai Sun
Keyword(s):  

CrystEngComm ◽  
2021 ◽  
Author(s):  
Junhua Zhao ◽  
Qin Hu ◽  
Yinlin Lei ◽  
Chuanhua Gao ◽  
Pinjie Zhang ◽  
...  

As a powerful self-assembly process, the soft-template method has attracted considerable scientific interest, but there is a challenge associated with ultralong hydroxyapatite nanowire (HAPNWs) with several tens of micro-scale length....


2002 ◽  
Vol 735 ◽  
Author(s):  
Sang Woo Lee ◽  
Helen A. McNally ◽  
Rashid Bashir

ABSTRACTIn this paper we present techniques, utilizing dielectrophoresis and electrohydrodynamics, which can possibly be used for assembling devices suspended in a solution onto a binding site on a substrate. We explored the concepts using micro-scale negatively charged polystyrene beads and rectangular silicon blocks. Dielectrophoretic forces on devices in buffer solutions were examined as a function of frequency of the applied AC signal. The observed results can be explained by taking in account electro-thermal and AC electroosmotic effects. The study described in the paper can be used for placing and assembling micro and nano-electronic devices and objects at specific sites on various substrates, in combination with bio-inspired biological binding techniques such as DNA hybridization, antigen-antibody interactions, and ligand-receptor (avidin-biotin) interactions.


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