Comparative Study of the Conditions for SiCN-Coatings Deposition in a Electron Beam Generated Plasma and in a Discharge with a Self-heated Hollow Cathode
Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
Vol 39
(10)
◽
pp. 1226-1240
◽
Keyword(s):
Keyword(s):
2000 ◽
Vol 13
(4)
◽
pp. 497-502
2009 ◽
Vol 6
(S1)
◽
pp. S247-S252
◽
Keyword(s):