Comparative Study of the Conditions for SiCN-Coatings Deposition in a Electron Beam Generated Plasma and in a Discharge with a Self-heated Hollow Cathode

Author(s):  
Andrey Menshakov
2006 ◽  
Vol 51 (10) ◽  
pp. 1316-1319 ◽  
Author(s):  
Yu. A. Burachevsky ◽  
V. A. Burdovitsin ◽  
A. S. Klimov ◽  
E. M. Oks ◽  
M. V. Fedorov

2000 ◽  
Vol 13 (4) ◽  
pp. 497-502
Author(s):  
Myoung-Soo Kim ◽  
Dong-Heok Park ◽  
Min-Sub Han ◽  
Hak-Joon Kim ◽  
Myung-Goon Gil ◽  
...  

2018 ◽  
Vol 8 (1) ◽  
Author(s):  
Michal Horák ◽  
Kristýna Bukvišová ◽  
Vojtěch Švarc ◽  
Jiří Jaskowiec ◽  
Vlastimil Křápek ◽  
...  

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