Investigation on solid state bonding and intermetallic compounds reaction of Cu pillar bump/Ni micro cones

Author(s):  
Yukun Guo ◽  
Anmin Hu ◽  
Ming Li
2021 ◽  
Author(s):  
Siyan Liu ◽  
Chenlin Yang ◽  
huiqin Ling ◽  
Anmin Hu ◽  
Tao Hang ◽  
...  

Abstract With the shrinkage of size, porous Cu3Sn have become a new potential threat of the reliability in micron Cu pillar bump. The formation of porous Cu3Sn is contributed the decomposition of Cu6Sn5, which is caused by the overgrowth of intermetallic compounds (IMC) and the stress introduced by the phase transition of Cu6Sn5. In this paper, uniform Ф10 µm Cu/Sn and Cu/Ni (~0.6 μm)/Sn microbumps have been fabricated by multilayer electrodeposition and the effect of the Ni layer on the growth behavior of porous Cu3Sn was investigated by comparing the evolution of IMC in Cu/Sn and Cu/Ni/Sn bumps aged at 170 ℃ and 200 ℃. The ~0.6 μm Ni layer can effectively retard the Cu atoms diffusion, which can hinder IMC from overgrowth. Moreover, with the help of X-ray diffraction (XRD), the ability of the Ni layer in stabilizing Cu6Sn5 phase is strengthened, which weakens the tendency of the porous Cu3Sn formation. Under the conjoint action of retarding the growth of IMC and stabilizing Cu6Sn5 phase, the Ni layer can inhibit the formation of porous Cu3Sn efficaciously.


2021 ◽  
Vol 67 ◽  
pp. 35-45
Author(s):  
Shuangjie Zhang ◽  
Wei Wang ◽  
Shibo Ma ◽  
Qiang Li

1991 ◽  
Vol 179-181 ◽  
pp. 1166
Author(s):  
K. Abe ◽  
T. Higuchi ◽  
Y. Fujino

2018 ◽  
Vol 48 (2) ◽  
pp. 1079-1090 ◽  
Author(s):  
Lijun Liu ◽  
Xiuchen Zhao ◽  
Ping Chen ◽  
Ying Liu ◽  
Yong Wang ◽  
...  

2003 ◽  
Vol 2003 (0) ◽  
pp. 123-124
Author(s):  
Takashi SATO ◽  
Yoshinobu MOTOHASHI ◽  
Takaaki SAKUMA ◽  
Kazuyoshi WASEDA

1953 ◽  
Author(s):  
S. Storchheim ◽  
J.L. Zambrow ◽  
H.H. Hausner

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