Modeling study of scanning capacitance microscopy measurement for p-n junction dopant profile extraction

2005 ◽  
Author(s):  
J. Yang ◽  
Y.T. Yeow
Keyword(s):  
Scanning Capacitance Microscopy ◽  
Dopant Profile ◽  
Microscopy Measurement ◽  
Modeling Study

Dopant profile measurements in ion implanted 6H–SiC by scanning capacitance microscopy

2001 ◽  
Vol 184 (1-4) ◽  
pp. 183-189 ◽  
Author(s):  
F. Giannazzo ◽  
L. Calcagno ◽  
F. Roccaforte ◽  
P. Musumeci ◽  
F. La Via ◽  
...  
Keyword(s):  
Scanning Capacitance Microscopy ◽  
Dopant Profile ◽  
Ion Implanted
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