Abstract
The performance of SiC power devices has demonstrated superior characteristics as compared to conventional Silicon (Si) devices. Some of the advantages of SiC power devices over Si include higher voltage blocking capability, low specific on-resistance, high switching frequency, high temperature operation, and high power density. Thus, SiC modules are capable of processing significant levels of power within much smaller volumes compared with its Si counterparts. These high thermal loads present a formidable challenge in integrating SiC devices in power modules. For example, known-good materials and processes for silicon power modules are not rated at the aggressive operating conditions associated with SiC devices. Two of the most critical interfaces in a power electronics module are the die-attach and substrate- attach. A degradation in these interfaces often results in potentially catastrophic electrical and thermal failure. Therefore, it is very important to thoroughly evaluate die-attach materials before implementing them in SiC power modules. This paper presents the methodology for the evaluation of die attach materials for SiC power modules. Preforms of a lead-free high-temperature attach material were used to perform a die and substrate attach process on a conventional power module platform. The initial attach quality was inspected using non- destructive methods consisting of acoustic microscopy and x-ray scanning. Die attach and substrate attach voiding of < 5% was obtained indicating a very good attach quality. Cross-sectioning techniques were used to validate the inspection methods. The initial attach strength was measured using pull tests and shear tests. The measurements were repeated at the rated temperature of the module to ensure that the properties did not degrade excessively at the service temperature. At the rated module temperature of 175 °C, the die bonding strength was found to be ~ 75 kg. This was only 25% lower than the strength at room temperature. In addition, the contact pull strength was measured to be > 90 kg at 175 °C, which was 25% lower than the value measured at room temperature. The effect of power cycling and thermal cycling on the quality and strength of the die and substrate attach layers was also investigated.
Reliable low-temperature die attach process using Ag/Sn/Ag sandwich structure for high-temperature semiconductor devices
