Influence of Silver Glue on the Die Bonding Process of MEMS Gas Sensors

Author(s):  
Shi-Yan Fang ◽  
Yu-Quan Zhuang ◽  
Ting-Jen Hsueh ◽  
Tien-Tsorng Shih
Author(s):  
Jinglong Li ◽  
Motohiko Masuda ◽  
Yi Che ◽  
Miao Wu

Abstract Die attach is well known in die bonding process. Its electrical character is simple. But some failures caused by die attach are not so simple. And it is not proper to analyze by a generic analysis flow. The analysis of two failures caused by die attach are presented in this paper.


Author(s):  
Wang ZhiJie ◽  
Sonder Wang ◽  
J.H. Wang ◽  
Yao SuYing ◽  
R. Han

2020 ◽  
Vol 13 (0) ◽  
pp. E19-017-1-E19-017-11
Author(s):  
Dai Ishikawa ◽  
Bao Ngoc An ◽  
Matthias Mail ◽  
Helge Wurst ◽  
Benjamin Leyrer ◽  
...  

2018 ◽  
Vol 48 (1) ◽  
pp. 194-200 ◽  
Author(s):  
Pai-Jung Chang ◽  
Yue-Kai Tang ◽  
Wei-Han Lai ◽  
Anthony Shiaw-Tseh Chiang ◽  
C. Y. Liu

2011 ◽  
Vol 228-229 ◽  
pp. 558-562
Author(s):  
Yan Bing Xue ◽  
Zhen An Tang

A novel suspended ceramic hot-plate and wire-free bonding interconnection was investigated. The device was made on the popular alumina ceramic flakes with a platinum heater prepared by lift-off process. The structure of suspended beam was machined by laser micromachining technique. This contribution presents first results for single-layer’s ceramic hot-plates that include design, manufacturing and tests of such devices. The results show that the ceramic hot-plate has lower power consumption (280 mW at 400 °C) than classical ceramic gas sensors. Moreover, it has less expensive manufacturing and bonding process than Si manufacturing technology. Low power consumption and good performance at high working temperature (600 °C or more) makes it possibly to be used in some specific applications for gas sensors.


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