Contact Vs. Non-Contact Cleaning: Correlating Interfacial Reaction Mechanisms to Processing Methodologies for Enhanced FEOL/BEOL Post-CMP Cleaning

2021 ◽  
Vol 314 ◽  
pp. 237-246
Author(s):  
Katherine M. Wortman-Otto ◽  
Abigail N. Linhart ◽  
Allie M. Mikos ◽  
Kiana A. Cahue ◽  
Jason J. Keleher

Due to the emergence of sub-7 nm technologies, next generation CMP slurry formulations have continued to increase in additive (nanoparticle and chemistry) complexity to meet stringent device specifications. Therefore, it is essential to probe the molecular level interactions at the nanoparticle/slurry chemistry/substrate interface and in turn correlate them to key performance metrics such as removal rate, post CMP defects, and planarization efficiency. This work will address key interactions through a series of case studies focusing on the role of supramolecular structure and cleaning method (i.e. contact vs. non-contact) during STI post-CMP cleaning, probing the impact of supramolecular structure and mode of cleaning relevant to Cu post-CMP, and development of a biomimetic matrix with chemical activity to act as a brush in STI post-CMP cleaning processes. Results show in both BEOL and FEOL post-CMP cleaning there is a strong correlation to the delivery and “soft” nature of the chemistry to allow for effective particle removal at low mechanical force and prevent further defect formation. Furthermore, this work shows a clear correlation between supramolecular structure and particle removal efficiency under both contact and non-contact post-CMP processes.

2019 ◽  
Vol 9 (1) ◽  
pp. 158 ◽  
Author(s):  
Renaud G. Rinaldi ◽  
Lionel Manin ◽  
Sébastien Moineau ◽  
Nicolas Havard

The performance of a table tennis racket is often associated with subjective or quantitative criteria such as the adhesion, the control and the speed. Overall, the so-called performance aims at characterizing the impact with the ball. Ultimately, the polymeric layers glued onto the wooden blade play a key role, as evidenced in a previous work where the normal linear (no spin) impact of a ball onto polymeric layers was experimentally and numerically investigated. In this work, more realistic loading conditions leading to varying the incident angle and spin of the ball, were explored. While the sole linear restitution coefficient was determined in the anterior normal impact study, new physical metrics were identified to describe fully the trajectory of the reflected ball after impact. A companion 3D finite elements model was developed where the polymeric time-dependent dissipative compliant behavior measured with dynamic mechanical analysis and compression tests was accounted for. The confrontations with the experimental data highlighted the key role of the polymer intrinsic properties along with the friction coefficient between the ball and the polymer external layer.


2021 ◽  
Vol 18 (6) ◽  
pp. 7580-7601
Author(s):  
C. W. Chukwu ◽  
◽  
F. Nyabadza ◽  
Fatmawati ◽  
◽  
...  

<abstract><p>Human Listeria infection is a food-borne disease caused by the consumption of contaminated food products by the bacterial pathogen, Listeria. In this paper, we propose a mathematical model to analyze the impact of media campaigns on the spread and control of Listeriosis. The model exhibited three equilibria namely; disease-free, Listeria-free and endemic equilibria. The food contamination threshold is determined and the local stability analyses of the model is discussed. Sensitivity analysis is done to determine the model parameters that most affect the severity of the disease. Numerical simulations were carried out to assess the role of media campaigns on the Listeriosis spread. The results show that; an increase in the intensity of the media awareness campaigns, the removal rate of contaminated food products, a decrease in the contact rate of Listeria by humans results in fewer humans getting infected, thus leading to the disease eradication. An increase in the depletion of media awareness campaigns results in more humans being infected with Listeriosis. These findings may significantly impact policy and decision-making in the control of Listeriosis disease.</p></abstract>


2021 ◽  
Vol 4 (11) ◽  
pp. 119-128
Author(s):  
Habiba Nakhli

The aim of this study is to identify the teaching procedures generally conducted by translation teachers, and investigate their impact on the development of students’ translation competence (TC). The study emphasizes the importance of substituting the traditional “read and translate” method for a student-centered teaching approach that relies on hands-on tasks and engaging activities.  These teaching procedures include intra- and extra-mural activities and tasks addressing different sub-competencies and skills and aiming at developing students' general TC. In order to study the impact of these teaching procedures on TC, we implemented a descriptive method that draws upon self-report data and observation of translation teachers and students in a classroom setting. We observed a group of MA translation students in the Faculty of Letters and Humanities in Tetouan and King Fahd School of Translation in Tangiers- Abdelmalek Essaadi University, Morocco. The observation reports and teachers questionnaires provided significant data about classroom practices, while the survey of students’ levels of TC revealed that the respondents’ mastery level of TC ranges from low to high across the different sub-competences. We subsequently compared students’ mastery levels to the general patterns governing the teachers’ teaching procedures, and the findings showed a clear correlation between the two. Accordingly, the type and focus of the tasks and activities performed by students have a direct impact on their TC development.


2020 ◽  
Author(s):  
Isabela Cunha Navarro ◽  
Francesca Tuorto ◽  
David Jordan ◽  
Carine Legrand ◽  
Jonathan Price ◽  
...  

ABSTRACTMethylation of carbon-5 of cytosines (m5C) is a post-transcriptional nucleotide modification of RNA found in all kingdoms of life. While individual m5C-methyltransferases have been studied, the impact of the global cytosine-5 methylome on development, homeostasis and stress remains unknown. Here, using Caenorhabditis elegans, we generated the first organism devoid of m5C in RNA, demonstrating that this modification is non-essential. We determined the localisation and enzymatic specificity of m5C sites in RNA in vivo and showed that animals devoid of m5C are sensitive to temperature stress. At the molecular level, we showed that loss of m5C specifically impacts decoding of leucine and proline thus reducing the translation efficiency of transcripts enriched in these amino acids. Finally, we found translation of leucine UUG codons to be the most strongly affected upon heat shock, suggesting a role of m5C tRNA wobble methylation in the adaptation to heat stress.


2015 ◽  
Vol 17 (2) ◽  
pp. 96-102 ◽  
Author(s):  
Magdalena Janus ◽  
Kamila Bubacz ◽  
Justyna Zatorska ◽  
Ewelina Kusiak-Nejman ◽  
Adam Czyżewski ◽  
...  

Abstract The conducted studies were focused on the development of the gypsum material exhibiting self-cleaning properties. To this end, the raw gypsum was mixed with unique TiO2-based photocatalysts, previously modified by nitrogen and/ or carbon doping. The photocatalytic activity of the obtained gypsum plasters was evaluated trough the degradation of model organic compound (Reactive Red 198) under UV-vis irradiation. The impact of the photocatalysts presence on the physicochemical properties of the obtained gypsum plasters was evaluated. Furthermore, the role of non-metals presence on the photocatalytic properties of the TiO2 was determined. It was confirmed that the addition of N,C co-modified titanium dioxide into gypsum bestows this material with self-cleaning properties. The highest dye removal rate was displayed by the gypsum plaster containing optimal amount (10 wt%) of co-modified TiO2/N,C photocatalyst, after 20 hours of UV-vis irradiation.


2020 ◽  
Vol 19 (2) ◽  
pp. 67-70
Author(s):  
Cerys Johnson

Purpose The author, CEO of a global enterprise, set out to explore the impact of employee and manager relationships on engagement. Her goal was to then determine strategies to improve these relationships to boost engagement. Design/methodology/approach The author first reviewed studies regarding the impact of engaged employees on businesses and the role of employee and senior relationships with regards to this. She then explored the most effective approaches to improve these relationships and thereby employee engagement. Findings While it is not the only factor involved, there is a clear correlation between the relationships between employees and business leaders and employee engagement. There are several strategies businesses can adopt to improve the communication between these parties and remove hierarchical barriers, which will in turn improve employee engagement. Originality/value The value was in demonstrating that there are a wide variety of strategies businesses can use to improve engagement, using technology as well as traditional methods to ensure they reach all members of staff.


2013 ◽  
Vol 44 (5) ◽  
pp. 311-319 ◽  
Author(s):  
Marco Brambilla ◽  
David A. Butz

Two studies examined the impact of macrolevel symbolic threat on intergroup attitudes. In Study 1 (N = 71), participants exposed to a macrosymbolic threat (vs. nonsymbolic threat and neutral topic) reported less support toward social policies concerning gay men, an outgroup whose stereotypes implies a threat to values, but not toward welfare recipients, a social group whose stereotypes do not imply a threat to values. Study 2 (N = 78) showed that, whereas macrolevel symbolic threat led to less favorable attitudes toward gay men, macroeconomic threat led to less favorable attitudes toward Asians, an outgroup whose stereotypes imply an economic threat. These findings are discussed in terms of their implications for understanding the role of a general climate of threat in shaping intergroup attitudes.


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