Novel Method for Extracting Material Constants of Epitaxial Wurtzite AlScN Films on Sapphire Using Higher Order Surface Acoustic Wave Modes

Author(s):  
Niclas M. Feil ◽  
Elena Mayer ◽  
Bjoern Christian ◽  
Anli Ding ◽  
Agne Zukauskaite ◽  
...  
2021 ◽  
Vol 130 (16) ◽  
pp. 164501
Author(s):  
N. M. Feil ◽  
E. Mayer ◽  
A. Nair ◽  
B. Christian ◽  
A. Ding ◽  
...  

Author(s):  
Yancheng Wang ◽  
Chenyang Han ◽  
Deqing Mei ◽  
Chengyao Xu

Abstract Polymer-based substrates with patterned microstructure on the surfaces, e.g., cell culturing scaffolds, have been utilized in biomedical applications. This paper develops a novel method to fabricate the localized microstructure on the polymer-based substrate with the assistance of standing surface acoustic wave (SAW) and user-defined acoustic waveguides. The specific designed acoustic waveguides can localize the standing acoustic waves and transmit to the liquid film and excite patterned microstructures on the surface, then using ultraviolet (UV) to solidify the substrate with patterned microstructures. The structural design and fabrication of the SAW device and three different shaped acoustic waveguides are presented. Then, experimental setup and procedures to verify the polymer-substrate with localized microstructures fabrication are performed. By using the different shape of the acoustic waveguides, several types of patterned microstructures with different morphologies are successfully fabricated. Results demonstrated that the proposed fabrication method is an effective way to fabricate polymer-based substrate with localized patterned microstructures, which may have potential in the research on tissue engineering, cell-cell interaction, and other biomedical applications.


2008 ◽  
Vol 93 (9) ◽  
pp. 094105 ◽  
Author(s):  
X. Y. Du ◽  
Y. Q. Fu ◽  
S. C. Tan ◽  
J. K. Luo ◽  
A. J. Flewitt ◽  
...  

1977 ◽  
Vol 23 (10) ◽  
pp. 611-617
Author(s):  
D. K. Paul ◽  
B. Kumar ◽  
S. C. Bhatia

2005 ◽  
Vol 3 (1) ◽  
pp. 66-70 ◽  
Author(s):  
David A. Powell ◽  
Kourosh Kalantar-Zadeh ◽  
Samuel Ippolito ◽  
Wojtek Wlodarski

2016 ◽  
Vol 14 (4) ◽  
pp. 369-375
Author(s):  
Hu Youwang ◽  
Xu Chengzhi ◽  
Duan Ji'an ◽  
Xiang Jiwen ◽  
Wang Shu ◽  
...  

Sensor Review ◽  
2016 ◽  
Vol 36 (4) ◽  
pp. 421-428 ◽  
Author(s):  
Jian Yang ◽  
Hejuan Chen

Purpose This paper aims to investigate the response behavior of the surface acoustic wave (SAW) sensor under the loading of micro-particles and to evaluate the feasibility of using the SAW sensor to study the micro-contact of the particle–plane interface. Design/methodology/approach An analytical perturbation theory of the coupled system of particle and SAW is presented. It shows that in the weak-coupling regime, the SAW sensor detects the coupling stiffness rather than the additional mass of the particle at the interface. The frequency perturbation formula expressed in parameters of the geometry and mechanical properties of the contact is further derived. The frequency shift of a 262-MHz Rayleigh-type SAW in the oscillation configuration under the loading of multiple starch particles of different sizes has been measured. Findings The experiment results of a linear relationship between the frequency increase and the sum of the radius of particles to the power of 2/3 verified the validity of the theory of linking the SAW response to the geometry and mechanical properties of the contact. Originality/value The SAW sensor could serve as a new candidate for studying the details of mechanical properties of the micro-contact of the interface.


2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4590-4592 ◽  
Author(s):  
Maw-Shung Lee ◽  
Feng-Chih Chang ◽  
Sean Wu ◽  
Long Wu

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