Feasibility Study of Solid-phase Epitaxial Regrowth (SPER) as an Ultra-shallow Junction (USJ) Technology for High-performance CMOS Devices
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2013 ◽
Vol 40
(7)
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pp. 1065-1070
2012 ◽
Vol 40
(2)
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pp. 298
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2013 ◽
Vol 41
(9)
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pp. 1418
2015 ◽
Vol 33
(4)
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pp. 354
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2013 ◽
Vol 30
(9)
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pp. 896-902
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2014 ◽
Vol 32
(3)
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pp. 294
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