Aluminum Oxide Deposited by Pulsed-DC Reactive Sputtering for Crystalline Silicon Surface Passivation

2013 ◽  
Vol 3 (3) ◽  
pp. 930-935 ◽  
Author(s):  
Meenakshi Bhaisare ◽  
Abhishek Misra ◽  
Anil Kottantharayil
Keyword(s):  
Aluminum Oxide ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Reactive Sputtering ◽  
Pulsed Dc ◽  
Silicon Surface Passivation

Crystalline silicon surface passivation investigated by thermal atomic-layer-deposited aluminum oxide

2017 ◽  
Vol 26 (9) ◽  
pp. 098103 ◽  
Author(s):  
Cai-Xia Hou ◽  
Xin-He Zheng ◽  
Rui Jia ◽  
Ke Tao ◽  
San-Jie Liu ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Surface Passivation

scholarly journals High quality crystalline silicon surface passivation by combined intrinsic and n-type hydrogenated amorphous silicon

2011 ◽  
Vol 99 (20) ◽  
pp. 203503 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
High Quality ◽  
Hydrogenated Amorphous ◽  
Silicon Surface Passivation

Improvement of crystalline silicon surface passivation by hydrogen plasma treatment

2004 ◽  
Vol 84 (9) ◽  
pp. 1474-1476 ◽  
Author(s):  
I. Martı́n ◽  
M. Vetter ◽  
A. Orpella ◽  
C. Voz ◽  
J. Puigdollers ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogen Plasma ◽  
Silicon Surface Passivation

The effect of light soaking on crystalline silicon surface passivation by atomic layer deposited Al2O3

2013 ◽  
Vol 113 (2) ◽  
pp. 024509 ◽  
Author(s):  
Baochen Liao ◽  
Rolf Stangl ◽  
Thomas Mueller ◽  
Fen Lin ◽  
Charanjit S. Bhatia ◽  
...  
Keyword(s):  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Surface Passivation ◽  
Effect Of Light
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