Inductively Coupled Plasma Etching of Complementary Barrier Infrared Detector Focal Plane Arrays for Long-Wave Infrared Imaging

2012 ◽  
Vol 24 (18) ◽  
pp. 1581-1583 ◽  
Author(s):  
Jean Nguyen ◽  
Alexander Soibel ◽  
Sir B. Rafol ◽  
Arezou Khoskhlagh ◽  
John K. Liu ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Focal Plane ◽  
Inductively Coupled Plasma ◽  
Infrared Imaging ◽  
Infrared Detector ◽  
Focal Plane Arrays ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Long Wave ◽  
Long Wave Infrared

Inductively coupled plasma etching for large format HgCdTe focal plane array fabrication

2005 ◽  
Vol 34 (6) ◽  
pp. 746-753 ◽  
Author(s):  
E. P. G. Smith ◽  
G. M. Venzor ◽  
M. D. Newton ◽  
M. V. Liguori ◽  
J. K. Gleason ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Focal Plane ◽  
Inductively Coupled Plasma ◽  
Focal Plane Array ◽  
Large Format ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Array Fabrication

320 x 256 complementary barrier infrared detector focal plane array for long-wave infrared imaging

2012 ◽  
Author(s):  
Jean Nguyen ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoskhlagh ◽  
David Z.-Y. Ting ◽  
...  
Keyword(s):  
Focal Plane ◽  
Infrared Imaging ◽  
Infrared Detector ◽  
Focal Plane Array ◽  
Long Wave ◽  
Long Wave Infrared

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere lithography

2009 ◽  
Vol 517 (14) ◽  
pp. 3859-3861 ◽  
Author(s):  
Byung-Jae Kim ◽  
Hyunjung Jung ◽  
Hong-Yeol Kim ◽  
Joona Bang ◽  
Jihyun Kim
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Nanosphere Lithography ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
Sign in / Sign up

Export Citation Format

Share Document